Method for making silica-titania glass having ternary doped critical zone
    2.
    发明专利
    Method for making silica-titania glass having ternary doped critical zone 审中-公开
    制造具有三重关键区域的二氧化硅玻璃的方法

    公开(公告)号:JP2013056819A

    公开(公告)日:2013-03-28

    申请号:JP2012189672

    申请日:2012-08-30

    Abstract: PROBLEM TO BE SOLVED: To provide a doped silica-titania glass that has the required improvements for certain parameters such as a tolerance value for Tzc, CTE vs. temperature slope and Tzc spatial homogeneity and is suitable for use in below 25 nm node lithography as an element of a system.SOLUTION: Selected weight of silica-titania powders and selected weight of dopant powders are weighed out and the silica-titania powders and the selected dopant powders are mixed for forming slurry of the mixed powders using a selected fluid. The slurry is sprayed and dried to form a powder containing free-flowing fine particles having a size of approximately 200 μm diameter or less. The powder is shaped into a shaped article by uniaxial pressing and then further by cold isostatic pressing. The shaped article is consolidated by hot pressing to shape into a doped silica-titania glass blank and further the glass blank is annealed.

    Abstract translation: 要解决的问题:提供掺杂的二氧化硅 - 二氧化钛玻璃,其对于某些参数(例如Tzc,CTE与温度斜率和Tzc空间均匀性的公差值)具有必要的改进,并且适用于低于25nm 节点光刻作为系统的一个要素。 解决方案:称出二氧化硅 - 二氧化钛粉末的选定重量和选择重量的掺杂剂粉末,并且使用所选择的流体混合二氧化硅 - 二氧化钛粉末和所选择的掺杂剂粉末以形成混合粉末的浆料。 将浆料喷雾并干燥以形成包含直径为约200μm或更小的尺寸的自由流动的细颗粒的粉末。 通过单轴压制将粉末成形为成形制品,然后通过冷等静压制成。 通过热压将成形制品固结成形成掺杂的二氧化硅 - 二氧化钛玻璃坯料,并进一步对玻璃坯料进行退火。 版权所有(C)2013,JPO&INPIT

    透明蛍光体及びその製造方法

    公开(公告)号:JPWO2009119668A1

    公开(公告)日:2011-07-28

    申请号:JP2010505729

    申请日:2009-03-25

    Abstract: 劣化しやすい樹脂及び低融点ガラスを用いずに構成され、演色性が良好な透明蛍光体及びその製造方法を提供する。励起光の入射によって白色蛍光を呈する透明蛍光体において、A(AはAl、Ga、Ge、W、P、V、Zn、Si、B、Mg、Ca、Ba、Sr及びScのいずれか一以上の元素)、Ln(LnはY、Gd、La、Sm、Dy、Ho、Er、Yb及びLuのいずれか一以上の元素)、O及び付活剤としてのR(RはEu、Tb、Ce、Sm、Tm、Pr、Nd、Dy、Ho、Er、Yb、Mn、Ti、Fe、Cr及びPbのいずれか一以上の元素であって、Lnとして選択される元素以外の元素)を主成分とする非晶質相を主相とする、少なくともRの種類又はRの平均価数を異にする二種類以上の蛍光相から形成されていることを特徴とする。

    Release sheet
    8.
    发明专利
    Release sheet 有权
    发表

    公开(公告)号:JP2008031020A

    公开(公告)日:2008-02-14

    申请号:JP2006208774

    申请日:2006-07-31

    Abstract: PROBLEM TO BE SOLVED: To provide a release sheet which can keep product quality high in the manufacture of silicon carbide or aluminum nitride by press-compacting and improving operation efficiency and the yield and comprises exfoliated graphite as a base mateiral. SOLUTION: The sheet is formed from the exfoliated graphite and has -4 cm 2 /s gas permeability. Because the gas permeability is higher than that of a sheet of graphite felt or the like conventionally used, the deterioration of a mold due to a gas produced by the reaction of a gasified raw material or sheet with the raw material is suppressed by arranging the sheet between the raw material and the mold or the like in the manufacture of metals of silicon carbide, aluminum nitride or the like. Further, the product quality is improved by preventing a problem that bubbles are generated in the product. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种通过压制成型可以保持产品质量高的碳化硅或氮化铝的剥离片,提高了操作效率和产率,并且包括作为基材的剥离石墨。 解决方案:片材由剥离石墨形成,具有<1.0×10 -4 cm 2 / s的透气性。 由于气体渗透性高于常规使用的石墨毡等的气体渗透性,因此通过将气化的原料或片材与原料的反应产生的气体导致的模具的劣化被抑制, 在制造碳化硅,氮化铝等金属的原料和模具等之间。 此外,通过防止产品中产生气泡的问题,提高了产品质量。 版权所有(C)2008,JPO&INPIT

    Free-cutting glass ceramic and its producing method
    9.
    发明专利
    Free-cutting glass ceramic and its producing method 有权
    自由切割玻璃陶瓷及其生产方法

    公开(公告)号:JP2007246297A

    公开(公告)日:2007-09-27

    申请号:JP2006068191

    申请日:2006-03-13

    CPC classification number: C03B32/02 C03B19/063 C03C3/064 C03C3/118 C03C10/00

    Abstract: PROBLEM TO BE SOLVED: To improve machinability and mechanical strength of a free-cutting glass ceramic, in which fluorine mica crystals are dispersed in borosilicate glass, by controlling the growth of the fluorine mica crystals.
    SOLUTION: A glass body obtained from a raw material blend having a composition comprising, by mass based on the terms of oxide except fluorine, 35-60% SiO
    2 , 5-20% Al
    2 O
    3 , 10-35% MgO, 5-20% K
    2 O, 2-10% B
    2 O
    3 , 0-10% ZrO
    2 , and 1-15% F is subjected to a crystallization heat-treatment by a hot isostatic pressing (HIP) method using an inert gas or a mixed gas of the inert gas and oxygen as a pressure medium. It is preferable that the HIP treatment is performed by a first step (crystal nucleus formation) wherein the pressure is ≥50 MPa and the temperature is 650-850°C and a second step (crystal growth) wherein the pressure is ≥80 MPa and the temperature is 900-1,100°C.
    COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 解决的问题:通过控制氟云母晶体的生长,提高将氟云母晶体分散在硼硅酸盐玻璃中的自由切削玻璃陶瓷的机械加工性和机械强度。 &lt; P&gt;解决方案:从原料共混物获得的玻璃体,其组成包括以氟为基础的除氧之外的氧化物的量,35-60%SiO 2 SB 2-8%,5-20% SB> 2 3 ,10-35%MgO,5-20%K 2 O,2-10%B 2

Patent Agency Ranking