Euv ray spectrum measuring instrument, and euv ray power calculation method
    5.
    发明专利
    Euv ray spectrum measuring instrument, and euv ray power calculation method 审中-公开
    EUV RAY光谱测量仪器和EUV RAY功率计算方法

    公开(公告)号:JP2005233828A

    公开(公告)日:2005-09-02

    申请号:JP2004044724

    申请日:2004-02-20

    Abstract: PROBLEM TO BE SOLVED: To provide an EUV ray spectrum measuring instrument capable of measuring precisely a spectrum of an EUV ray emitted from the divergent center of an extreme ultraviolet (EUV) ray source in every emission direction, and to provide a power calculation method for calculating precisely EUV ray power.
    SOLUTION: This EUV ray spectrum measuring instrument concerned in the present invention for measuring the spectrum of the EUV ray emitted from the divergent center of the EUV ray source has a driving mechanism for making a spectrum measuring means having a spectral diffraction element and a detector having spatial resolution along a spectral dispersion direction by the spectral diffraction element movable with respect to the divergent center.
    COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种EUV射线光谱测量仪器,其能够精确地测量在每个发射方向上从极紫外(EUV)射线源的发散中心发射的EUV射线的光谱,并提供功率 精确计算EUV射线功率的计算方法。 解决方案:本发明涉及的用于测量从EUV射线源的发散中心发射的EUV射线的光谱的EUV射线光谱测量仪具有用于制造具有光谱衍射元件的光谱测量装置的驱动机构, 检测器,其通过相对于发散中心可移动的光谱衍射元件沿着光谱色散方向具有空间分辨率。 版权所有(C)2005,JPO&NCIPI

    6.
    发明专利
    失效

    公开(公告)号:JP2002540391A

    公开(公告)日:2002-11-26

    申请号:JP2000606972

    申请日:2000-03-15

    ARTICLE DATA CONNECTOR AND ARTICLE RECOGNITION SYSTEM

    公开(公告)号:JP2001076013A

    公开(公告)日:2001-03-23

    申请号:JP2000198742

    申请日:2000-06-30

    Applicant: NCR INT INC

    Abstract: PROBLEM TO BE SOLVED: To speedily and securely recognize an article, without having to visually confirm the article or refer to an article code stored in a data file. SOLUTION: This system is equipped with an article data collector 14, which has minimum spectrum distortion and this article data collector 14 includes an optical path tube having an entrance and an exit that part of light reflected by an article 18 passes through and a spectrometer, which is adjacent to the exit end of the optical path tube and devides part of the light to ones having plural wavelengths and generate signals related to those wavelengths for identifying the article.

    MEASURING DEVICE, AND CALCULATING DEVICE AND METHOD FOR LIGHT SOURCE CHARACTERISTIC VALUE

    公开(公告)号:JPH1194644A

    公开(公告)日:1999-04-09

    申请号:JP25898697

    申请日:1997-09-24

    Applicant: CANON KK

    Abstract: PROBLEM TO BE SOLVED: To provide a measuring device for measuring light made incident from a light source with high accuracy, and a light source characteristic value calculating device and method for calculating the characteristic value of the light source with ease and high accuracy. SOLUTION: This calculating device is provided with light detection units 10a-10c, which are given spectral sensitivity characteristics meeting the requirements for a router. Further, a light detection unit 10d is provided and given a spectral sensitivity characteristic with its main spectral sensitivity peak in a wavelength range >=580 nm and its main sensitivity corresponding to a wavelength range between 600 and 680 nm. The calculating device calculates color temperature, illumination (brightness) and a color rendering property through linear computations based on output signals from the light detection units 10a-10d.

    LASER BEAM SOURCE DEVICE
    9.
    发明专利

    公开(公告)号:JPH1131859A

    公开(公告)日:1999-02-02

    申请号:JP18654597

    申请日:1997-07-11

    Applicant: SUN TEC KK

    Abstract: PROBLEM TO BE SOLVED: To provide with a very simple constitution a laser beam source device wherein emission wavelength is accurately controlled. SOLUTION: The beam emitted from a laser diode 1 is made incident on a beam splitter 5, and its reflected beam is supplied to an optical bandpass filter 8. The beam which transmits the optical bandpass filter 8 is photodetected with a photodiode PD1. The beam reflected on the optical bandpass filter 8 and transmitting the beam splitter 5 is photodetected with a photodiode PD2. The emission wavelength of a laser beam source is controlled so that the photodetection ratio between the photodiodes PD1 and PD2 is constant, so that a laser beam of accurate wavelength is emitted.

    PHOTOTHERMAL BENDING SPECTROSCOPE AND SPECTROSCOPY

    公开(公告)号:JPH10197464A

    公开(公告)日:1998-07-31

    申请号:JP47297

    申请日:1997-01-07

    Abstract: PROBLEM TO BE SOLVED: To enable measurement of the level and density of a defect and the concentration of impurities in a thin film and the amount of hydrogen and nitrogen contained therein by inputting and storing a data using a computer while performing a feeding of wavelength of a monochrometer and an altering of an optical filter. SOLUTION: An excitation light source system A comprises a light source 1, a monochrometer 2, a light chopper 3, a reflection mirror 4, a sapphire lens 5 for condensing and the like. A signal detection system B comprises a thin film holder 6, a deflection value detection laser 7, a position sensitivity detector 8 and a lock-in amplifier 9. A control system C inputs and stores data using a computer 10 from an output signal from a lock-in amplifier 9 while performing a feeding of wavelength of a monochrometer, and an altering of an optical filter. The possibility of measurement in vacuum thus obtained minimizes effect on the sample as compared with the conventional type to enable highly accurate measurement of the level and the density of a defect and the concentration of impurities in a thin film and the amount of hydrogen and nitrogen therein, thereby achieving a very high effectiveness.

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