公开(公告)号：KR1020100051738A

公开(公告)日：2010-05-17

申请号：KR1020107007066

申请日：2008-08-29

Applicant: 어플라이드 머티어리얼스, 인코포레이티드

Inventor： 바크라흐,로버트제트. ,  채,용-기 ,  최,수영 ,  데브리에스,니콜라스지.제이. ,  엘가르,야코브 ,  잉글하르트,에릭에이. ,  프레이,미첼알. ,  가이,찰스 ,  하우킨스,파리스 ,  호,초이 ,  헌터,제임스크래이그 ,  칸카나라,펜차라엔. ,  리,리웨이 ,  로,윙후 ,  루,단니캄토안 ,  메이,팡 ,  머피,스테판피. ,  파텔,스루잘 ,  사운더스,매튜제이.비. ,  슐레징거,아사프 ,  쉥,슈란 ,  수,트자이-파 ,  설리반,제프리에스. ,  탄너,데이비드 ,  트로우브리지,테레사 ,  월커,브라이스 ,  화이트,존엠. ,  원,태케이

IPC: H01L31/18 ,  H01L31/042

CPC classification number: H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

Abstract: The present invention relates to a system that can be used to form a photovoltaic device using processing modules that are adapted to perform steps in the solar cell formation process The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.

Abstract translation: 本发明涉及可用于使用适于在太阳能电池形成过程中执行步骤的处理模块形成光伏器件的系统。自动化太阳能电池制造厂通常是使用的自动化处理模块和自动化设备的布置 形成太阳能电池装置。 因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个适于在衬底的表面上沉积含硅层的处理室 ，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成 太阳能电池装置。