公开(公告)号：KR1020130118589A

公开(公告)日：2013-10-30

申请号：KR1020120041565

申请日：2012-04-20

申请人： 주식회사 아츠

发明人： 정진황 ,  조재현

IPC分类号： B65G49/06 ,  H01L21/677 ,  G02F1/13

CPC分类号： B65G49/061 ,  B65G39/02 ,  B65G49/067 ,  G02F1/1303 ,  H01L21/67706

摘要： PURPOSE: A cross roller apparatus for transferring a glass substrate is provided to stably, smoothly, and perpendicularly transfer a tray on which a glass substrate is placed. CONSTITUTION: A cross roller apparatus for transferring a glass substrate includes a pair of first transferring units (100) and a pair of second transferring units (200). The first transferring units are installed side by side. The second transferring units are installed side by side, and are perpendicular to the first transferring units. The first transferring units and the second transferring units are arranged into a rectangular shape. The first transferring unit includes a first supporting member (110), a first roller (120), a first transfer driving part, and a first lift driving part. The second transferring unit includes a second supporting member (210), a second roller (220), a second transfer driving part, and a second lift driving part. The second lift driving part supports and lifts the second supporting member.

摘要翻译： 目的：提供用于转移玻璃基板的交叉滚柱装置，以稳定，平稳且垂直地传送其上放置玻璃基板的托盘。 构造：用于转移玻璃基板的交叉滚柱装置包括一对第一转印单元（100）和一对第二转印单元（200）。 第一个转运单元并排安装。 第二转印单元并排安装，并且垂直于第一转印单元。 第一传送单元和第二传送单元被布置成矩形。 第一转印单元包括第一支撑构件（110），第一辊（120），第一转印驱动部和第一升降驱动部。 第二转印单元包括第二支撑构件（210），第二辊（220），第二转印驱动部和第二升降驱动部。 第二提升驱动部支承并提升第二支承构件。

公开(公告)号：KR101256131B1

公开(公告)日：2013-04-23

申请号：KR1020120006009

申请日：2012-01-19

申请人： 주식회사 아츠

发明人： 정진황 ,  노태우 ,  한만수 ,  조재현 ,  신윤철

IPC分类号： G01B5/06 ,  H01L51/56

CPC分类号： G01B5/06

摘要： PURPOSE: A measuring device with TM(Thickness Measurement) sensors is provided to prevent inconvenience caused by replacing the TM sensor by alternately utilizing a plurality of the TM sensors and to simplify a multi-shaft Ferro seal structure. CONSTITUTION: A measuring device with TM sensors comprises a housing unit, a TM sensor module(120), a chopper unit(130), a first motor(140), a second motor(160), a first measuring unit, and a second measuring unit. The TM sensor module is installed inside a sensor cover and fixed to a Ferro seal first shaft. A plurality of the TM sensors is installed along the periphery of the center of rotation. The TM sensors are selectively exposed to an exposure hole according to a rotating angle of the Ferro seal first shaft.

摘要翻译： 目的：提供具有TM（厚度测量）传感器的测量装置，以防止通过交替使用多个TM传感器来更换TM传感器造成的不便，并简化多轴Ferro密封结构。 构成：具有TM传感器的测量装置包括壳体单元，TM传感器模块（120），斩波单元（130），第一电动机（140），第二电动机（160），第一测量单元和第二 测量单位 TM传感器模块安装在传感器盖内并固定在Ferro密封件第一轴上。 多个TM传感器沿旋转中心的周边安装。 TM传感器根据Ferro密封件第一轴的旋转角度选择性地暴露于曝光孔。

公开(公告)号：KR1020130118585A

公开(公告)日：2013-10-30

申请号：KR1020120041559

申请日：2012-04-20

申请人： 주식회사 아츠

发明人： 정진황 ,  조재현

IPC分类号： B65G49/06 ,  H01L21/677 ,  G02F1/13

CPC分类号： B65G49/061 ,  B65G39/02 ,  B65G49/067 ,  G02F1/1303 ,  H01L21/67706

摘要： PURPOSE: A floating roller apparatus for transferring a glass substrate is provided to minimize the deformation of a transferring unit inside a chamber in order to transfer a glass substrate or a tray on which the glass substrate is placed even if the chamber is deformed by vacuum pressure inside the chamber. CONSTITUTION: A floating roller apparatus (10) for transferring a glass substrate includes a transferring unit (100), a guide part, and a spring (300). The transferring unit inside a chamber (20) transfers a glass substrate loaded inside the chamber or a tray on which the glass substrate is placed. The guide part guides the transferring unit so that the transferring unit moves in a width direction perpendicular to the transferring direction of the glass substrate. The spring provides the transferring unit with an elastic force so that the transferring unit guided by the guide part returns to an initial position. A pair of the transferring units at both sides inside the chamber is placed along the transferring direction of the glass substrate side by side. Multiple rollers (120) for transferring the tray on which the glass substrate is placed are longitudinally arranged at the supporting member (110) of the transferring unit. The guide part includes a fixing member and a first guide module (220).

摘要翻译： 目的：提供一种用于转移玻璃基板的浮动辊装置，以使室内的转印单元的变形最小化，以便即使室由真空压力变形而转移玻璃基板或其上放置玻璃基板的托盘 在房间里面 构造：用于转移玻璃基板的浮动辊装置（10）包括转印单元（100），引导部分和弹簧（300）。 室（20）内的传送单元传送装载在室内的玻璃基板或放置有玻璃基板的托盘。 引导部引导传送单元，使得传送单元在与玻璃基板的传送方向垂直的宽度方向上移动。 弹簧为传送单元提供弹性力，使得由引导部引导的传送单元返回到初始位置。 沿着玻璃基板的输送方向并排放置在室内的两侧的一对转印单元。 用于传送其上放置玻璃基板的托盘的多个辊（120）纵向布置在传送单元的支撑构件（110）处。 引导部分包括固定部件和第一引导模块（220）。

公开(公告)号：KR1020130104139A

公开(公告)日：2013-09-25

申请号：KR1020120025359

申请日：2012-03-13

申请人： 주식회사 아츠

发明人： 정진황 ,  노태우 ,  조재현 ,  이승준 ,  박상우 ,  이청명 ,  신윤철

IPC分类号： H01L51/56 ,  B65G49/00 ,  H01L21/677

CPC分类号： H01L21/67706 ,  B65G49/061 ,  B65G49/067 ,  H01L21/67718

摘要： PURPOSE: An apparatus for rotating a glass substrate is provided to stably load or unload the glass substrate by preventing interference on a fork of a transfer robot. CONSTITUTION: A flip body (120) rotates around a rotary shaft (113) which is horizontally located in a chamber (110). A gateway (111) is formed on one side of the chamber to horizontally input and output a glass substrate (10). A first holder (140) vertically faces a second holder (150) on the inner side of the flip body. A plurality of first lift driving units (160) and a plurality of second lift driving units (170) are formed on the upper surface and the lower surface of the flip body respectively. The first lift driving units and the second lift driving units are fixed on the upper surface and the lower surface of the flip body to be arranged in a vertical direction and a horizontal direction.

摘要翻译： 目的：提供一种用于旋转玻璃基板的装置，通过防止对传送机器人的叉子的干扰来稳定地加载或卸载玻璃基板。 构成：翻转体（120）围绕水平地位于室（110）中的旋转轴（113）旋转。 网关（111）形成在室的一侧，以水平地输入和输出玻璃基板（10）。 第一保持器（140）垂直面向翻盖体内侧上的第二保持器（150）。 多个第一提升驱动单元（160）和多个第二提升驱动单元（170）分别形成在翻盖体的上表面和下表面上。 第一升降驱动单元和第二提升驱动单元被固定在翻盖体的上表面和下表面上，以沿垂直方向和水平方向布置。