摘要:
PURPOSE: A vacuum device is provided to remove irregularity about the pressure distribution inside a chamber. CONSTITUTION: The vacuum device has each outlet(14) placed on the floor corner of a chamber(10) and a pressure gauge placed around each outlet. Each outlet is connected to a branch pipe(17) through a conductance variable valve(19) and a turbo-molecular pump is installed in the end of the branch pipe. The signal indicating an input value output from each pressure gauge, compares with the target value of the pressure gauge in a control unit and outputs to a valve driving motor as a control signal corresponding to the difference between the target values. On the basis of the control signal, the valve is open and shut to adjust gas inflow for discharging from the outlet and then irregularity of pressure distribution is removed around the stage inside the chamber.
摘要:
The present invention relates to an inline autoclave apparatus for joining a tray with a chamber and more specifically, to an inline autoclave apparatus to join a tray with a chamber which forms a closed space while a tray in which a substrate is safely settled in an autoclave process directly combined with a chamber during movement and performs bubble elimination and adhesion process within the space at the same time. The present invention is able to form a space by raising the tray being closely attached to the chamber in the autoclave process and does not need to be equipped with an additional door or an opening/closing means to form a high pressure space.
摘要:
PURPOSE: A vacuum heat treatment apparatus is provided to cover the circumference of an exhaust pipe with an insulating member, thereby smoothly discharging gas through the exhaust pipe, improving the life and stability of the vacuum heat treatment apparatus, reducing maintenance time, and enhancing the characteristics of products. CONSTITUTION: A vacuum heat treatment apparatus (100) comprises a chamber (10), an insulator (20) positioned within the chamber, a reaction container (30) positioned within the insulator, a heating member (40), and an exhaust pipe (50). An insulating member (70) surrounds the circumference of the exhaust pipe. The heating element is positioned between the chamber and the reaction container to heat the reaction container. The exhaust pipe discharges gas generated during the reaction and exhausts the reaction container. The insulating member comprises graphite felt.
摘要:
PURPOSE: A vacuum heat treatment apparatus is provided to increase the quantity of raw materials in a reaction container by discharging non-reacted gas through the pores of the reaction container without a separate exhaustion path. CONSTITUTION: A vacuum heat treatment apparatus includes a chamber (10), a reaction container (60), and a heating member (40). The reaction container is arranged in the chamber. The heating member heats the reaction container in the chamber. The reaction container includes a carbon composite. The porosity of the reaction container is in a range of 40-70%.
摘要:
PURPOSE: A vacuum heat treatment apparatus is provided to heat an exhaust pipe over a predetermined temperature, thereby preventing temperature of exhaust gas flowing in the exhaust pipe from suddenly dropping down. CONSTITUTION: A vacuum heat treatment apparatus comprises a chamber (10); a reaction container (30) disposed in the chamber; an exhaust pipe (40) to exhaust inside of the reaction container; and a heating member (42). The heating member heats the exhaust pipe up to 1000 to 1500°C.
摘要:
PURPOSE: An autoclave device is provided, which can prevent resin rich phenomena by minimizing the space where excess resin is collected by providing a compacting device that compacts corner part of the part to metal mold continuously during molding, and also prevent resin crack phenomena. CONSTITUTION: The device comprises a molding part and compacting device. The molding part consists of two metal molds(21), a part(22), a cure pad(24), a breader(23) and bagging film(25). The cure pad that is set on the corner part of the part layered on the metal mold transmits homogeneous exterior pressure to metal mold. Between the part and the cure pad, a breader covered with the bagging film is inserted, the bagging film forming a closed space and pressurizing the part by vacuum pressure. The compacting device that compacts corner part of the part to metal mold continuously during molding comprises a pair of cylinder(31), a length adjusting member(32), a piston(34), a spring(33) and position control device, the piston set at the other end of the cylinder enabling a reciprocal movement.