公开(公告)号：US20160018437A1

公开(公告)日：2016-01-21

申请号：US14773135

申请日：2014-03-14

申请人： Gregory ANDREEV ,  Sergey OSECHINSKIY ,  Stephen MINNE ,  Chanmin SU ,  Bruker Nano, Inc.

发明人： Gregory Andreev ,  Sergey Osechinskiy ,  Stephen Minne ,  Chanmin Su

IPC分类号： G01Q60/18

CPC分类号： G01Q30/04 ,  G01Q20/02 ,  G01Q60/18 ,  G01Q60/22

摘要： Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and optionally, in the mid-infrared portion of the spectrum.

摘要翻译： 用于纳米识别样品的装置和方法通过使用ev逝波测量在样品和在样品之上的纳米距离处振荡的样品和光学纳米天线之间的近场相互作用的光谱，并且鉴别背景散射辐射对这种近似不敏感 场相互作用。 通过在纳秒天线振荡的周期性重复时刻的光学数据采集可以实现歧视，而不知道距离分离纳米天线和样品。 测量包括纳米尺度上的样品的化学鉴定，其中直接测量相应于表示所述相互作用的近场辐射的相位的绝对值，而没有偏移。 仪器和测量的校准通过在样品测量之前执行具有已知折射率的参考样品的参考测量来提供。 纳米识别实现了低于50nm的分辨率，并且可选地在光谱的中红外部分中实现。

公开(公告)号：US20160356809A1

公开(公告)日：2016-12-08

申请号：US15241029

申请日：2016-08-18

申请人： Gregory Andreev ,  Sergey Osechinskiy ,  Stephen Minne ,  Chanmin Su

发明人： Gregory Andreev ,  Sergey Osechinskiy ,  Stephen Minne ,  Chanmin Su

IPC分类号： G01Q30/04 ,  G01Q60/22

CPC分类号： G01Q30/04 ,  G01Q20/02 ,  G01Q60/18 ,  G01Q60/22

摘要： Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and, optionally, in the mid-infrared portion of the spectrum.

摘要翻译： 用于纳米识别样品的装置和方法通过使用ev逝波测量在样品和在样品之上的纳米距离处振荡的样品和光学纳米天线之间的近场相互作用的光谱，并且鉴别背景散射辐射对这种近似不敏感 场相互作用。 通过在纳秒天线振荡的周期性重复时刻的光学数据采集可以实现歧视，而不知道距离分离纳米天线和样品。 测量包括纳米尺度上的样品的化学鉴定，其中直接测量相应于表示所述相互作用的近场辐射的相位的绝对值，而没有偏移。 仪器和测量的校准通过在样品测量之前执行具有已知折射率的参考样品的参考测量来提供。 纳米识别实现了低于50nm的分辨率，并且可选地在光谱的中红外部分中实现。