摘要:
A testing method of semiconductor integrated circuit wherein the quality of diffusion for semiconductor chips can be tested before the semiconductor chips become packaged semiconductor integrated circuits is provided. Input data is set, and circuit current values I(L) and I(H) obtained for each of a plurality of circuit areas are compared with first test pass ranges I1(L) and I1(H) to extract articles within the first test pass (S2), and the current values of the circuit areas determined to be articles within the first test pass and second test pass ranges I2(L), and I2(H) determined based on these current values are compared, thereby conducting a retest to extract circuit areas within the second test pass. The current values may be replaced by the voltage values.
摘要:
A testing method of semiconductor integrated circuit wherein the quality of diffusion for semiconductor chips can be tested before the semiconductor chips become packaged semiconductor integrated circuits is provided. Input data is set, and circuit current values I(L) and I(H) obtained for each of a plurality of circuit areas are compared with first test pass ranges I1(L) and I1(H) to extract articles within the first test pass (S2), and the current values of the circuit areas determined to be articles within the first test pass and second test pass ranges I2(L), and I2(H) determined based on these current values are compared, thereby conducting a retest to extract circuit areas within the second test pass. The current values may be replaced by the voltage values.