公开(公告)号：US07139620B2

公开(公告)日：2006-11-21

申请号：US10798283

申请日：2004-03-12

申请人： Yoshihiro Yamazaki ,  Hisonori Sakai

发明人： Yoshihiro Yamazaki ,  Hisonori Sakai

IPC分类号： G06F19/00 ,  G05B13/02 ,  B05C11/00 ,  G01N31/00 ,  G01N33/50 ,  G01N33/46

CPC分类号： H01J37/32082 ,  G05B13/024 ,  H01J37/32935 ,  H01J37/3299

摘要： In a method and apparatus for predicting process results of objects being processed in a processing chamber of a processing apparatus, operation data and process result data obtained at the time of processing each of the objects are collected and a multivariate analysis is performed on the basis of the collected operation data and process result data to obtain a first correlation therebetween. Process results are predicted on the basis of the first correlation. Weighting coefficients for the respective operation data are set on the basis of the predicted process results. A second correlation between the weighted operation data and the process result data is obtained by a multivariate analysis. Process results are predicted by using operation data, obtained when objects other than the objects used to obtain the second correlation are processed, on the basis of the second correlation.

摘要翻译： 在用于预测在处理装置的处理室中处理的对象的处理结果的方法和装置中，收集在处理每个对象时获得的操作数据和处理结果数据，并且基于 收集的操作数据和处理结果数据以获得它们之间的第一相关性。 在第一次相关的基础上预测过程结果。 基于预测的处理结果来设定各运算数据的加权系数。 通过多变量分析获得加权操作数据与处理结果数据之间的第二个相关性。 基于第二相关性，通过使用在除了用于获得第二相关性的对象之外的对象被处理时获得的操作数据来预测处理结果。