公开(公告)号：US07676296B2

公开(公告)日：2010-03-09

申请号：US11517279

申请日：2006-09-08

申请人： Katsuhisa Fujii ,  Masato Nomura ,  Shuji Ohno ,  Toshifumi Sohara

发明人： Katsuhisa Fujii ,  Masato Nomura ,  Shuji Ohno ,  Toshifumi Sohara

IPC分类号： G06F19/00

CPC分类号： G05B19/048 ,  G05B2219/24055 ,  G05B2219/45031

摘要： Disclosed is a method of verifying a recipe execution program. When a computer executes a recipe execution program, the computer sends instructions, which are issued based on a process recipe data defining specific operations to be performed by a substrate processing apparatus, to the substrate processing apparatus. When a computer executes a log output program, the computer outputs a log data indicating the instructions sent to the substrate processing apparatus. When a computer executes a comparing and checking program, the computer compares the log data which the process recipe data corresponding to the log data.

摘要翻译： 公开了一种验证配方执行程序的方法。 当计算机执行配方执行程序时，计算机发送基于将要由基板处理装置执行的特定操作的处理配方数据发布到基板处理装置的指令。 当计算机执行日志输出程序时，计算机输出指示发送到基板处理装置的指令的日志数据。 当计算机执行比较和检查程序时，计算机将对应于日志数据的处理配方数据的日志数据进行比较。

公开(公告)号：US07947926B2

公开(公告)日：2011-05-24

申请号：US11740497

申请日：2007-04-26

申请人： Katsuhisa Fujii ,  Tetsuya Oda ,  Akihiro Kubo

发明人： Katsuhisa Fujii ,  Tetsuya Oda ,  Akihiro Kubo

IPC分类号： H01L21/02 ,  F27B5/10

CPC分类号： H01L21/67126 ,  H01L21/324 ,  H01L21/67751

摘要： In a heat treatment method in which a semiconductor wafer is carried into a heat treatment chamber constituted of a heat plate and a cover body covering the heat plate and processed, until the wafer is carried into the heat treatment chamber, an opening and closing operation of the cover body is performed to maintain the accumulated heat temperature of the heat treatment chamber at a prescribed processing temperature.

摘要翻译： 在将半导体晶片搬运到由加热板构成的热处理室和覆盖该加热板的盖体进行处理的热处理方法中，直到将晶片搬入热处理室为止，开闭动作 执行盖体以将热处理室的累积热温度维持在规定的加工温度。

公开(公告)号：US20070286709A1

公开(公告)日：2007-12-13

申请号：US11740497

申请日：2007-04-26

申请人： Katsuhisa FUJII ,  Tetsuya Oda ,  Akihiro Kubo

发明人： Katsuhisa FUJII ,  Tetsuya Oda ,  Akihiro Kubo

IPC分类号： H01L21/673 ,  G06F19/00 ,  H01L21/324

CPC分类号： H01L21/67126 ,  H01L21/324 ,  H01L21/67751

摘要： In a heat treatment method in which a semiconductor wafer is carried into a heat treatment chamber constituted of a heat plate and a cover body covering the heat plate and processed, until the wafer is carried into the heat treatment chamber, an opening and closing operation of the cover body is performed to maintain the accumulated heat temperature of the heat treatment chamber at a prescribed processing temperature.

摘要翻译： 在将半导体晶片搬运到由加热板构成的热处理室和覆盖该加热板的盖体进行处理的热处理方法中，直到将晶片搬入热处理室为止，开闭动作 执行盖体以将热处理室的累积热温度维持在规定的加工温度。

公开(公告)号：US20070141730A1

公开(公告)日：2007-06-21

申请号：US11517279

申请日：2006-09-08

申请人： Katsuhisa Fujii ,  Masato Nomura ,  Shuji Ohno ,  Toshifumi Sohara

发明人： Katsuhisa Fujii ,  Masato Nomura ,  Shuji Ohno ,  Toshifumi Sohara

IPC分类号： H01L21/00

CPC分类号： G05B19/048 ,  G05B2219/24055 ,  G05B2219/45031

摘要： Disclosed is a method of verifying a recipe execution program. When a computer executes a recipe execution program, the computer sends instructions, which are issued based on a process recipe data defining specific operations to be performed by a substrate processing apparatus, to the substrate processing apparatus. When a computer executes a log output program, the computer outputs a log data indicating the instructions sent to the substrate processing apparatus. When a computer executes a comparing and checking program, the computer compares the log data which the process recipe data corresponding to the log data.

摘要翻译： 公开了一种验证配方执行程序的方法。 当计算机执行配方执行程序时，计算机发送基于将要由基板处理装置执行的特定操作的处理配方数据发布到基板处理装置的指令。 当计算机执行日志输出程序时，计算机输出指示发送到基板处理装置的指令的日志数据。 当计算机执行比较和检查程序时，计算机将对应于日志数据的处理配方数据的日志数据进行比较。