PRESSURE RELIEF VALVE
    1.
    发明申请
    PRESSURE RELIEF VALVE 有权
    压力减压阀

    公开(公告)号:US20110204266A1

    公开(公告)日:2011-08-25

    申请号:US13125453

    申请日:2009-10-19

    Abstract: A micromechanical pressure relief valve arrangement (10) comprises a stack of wafers (13). An active pressure relief valve (20) is realized within the stack of wafers (13). A passive pressure relief valve (30) is also realized within said stack of wafers (13), arranged in parallel to the active pressure relief valve (20). A check valve (50), also realized within the stack of wafers (13), is arranged in series with both the active pressure relief valve (20) and the passive pressure relief valve (30).

    Abstract translation: 微机械压力释放阀装置(10)包括一叠晶片(13)。 在晶片堆叠(13)内实现主动减压阀(20)。 在所述堆叠的晶片(13)内还实现被动的压力释放阀(30),其平行于主动减压阀(20)布置。 在晶片堆叠(13)内实现的止回阀(50)与主动减压阀(20)和被动式压力释放阀(30)同时布置。

    FILTER COMPRISING STACKABLE FILTER WAFERS WITH FILTERING CHANNELS ON OPPOSING SIDES OF THE WAFERS
    3.
    发明申请
    FILTER COMPRISING STACKABLE FILTER WAFERS WITH FILTERING CHANNELS ON OPPOSING SIDES OF THE WAFERS 审中-公开
    过滤器,包括过滤器在过滤面上的过滤器

    公开(公告)号:US20130008848A1

    公开(公告)日:2013-01-10

    申请号:US13637231

    申请日:2011-04-04

    CPC classification number: B01D29/46

    Abstract: A filter comprises a stack of wafers (28). Each of the wafers has a through hole (6). Edges (7) of the holes together define an internal tube. An interface (32) between adjacent wafers defines filter channels. The filter channels comprises first coarse filter channels (20), second coarse filter channels (22) and fine filter channels (26). The first coarse filter channels are open towards an outer rim (5), extend in a direction from the outer rim and are closed towards the internal tube. The second coarse filter channels are arranged in an opposite manner. The fine filter channels connect the first and second coarse filter channels. The first and second coarse filter channels extend radially (R) and the fine filter channels extend tangentially (T). The first and second coarse filter channels are defined by recesses in a surface of a first wafer and the fine filter channels are defined by recesses, each one encircling the hole, in a surface of a second wafer.

    Abstract translation: 过滤器包括一叠晶片(28)。 每个晶片具有通孔(6)。 孔的边缘(7)一起限定内管。 相邻晶片之间的界面(32)定义了过滤器通道。 滤波器通道包括第一粗滤波器通道(20),第二粗滤波器通道(22)和精滤波器通道(26)。 第一粗过滤器通道朝向外边缘(5)打开,沿着从外边缘的方向延伸并朝向内管封闭。 第二粗滤波器通道以相反的方式布置。 精细滤波器通道连接第一和第二粗滤波器通道。 第一和第二粗滤器通道径向延伸(R),细过滤通道切向延伸(T)。 第一和第二粗滤波器通道由第一晶片的表面中的凹槽限定,并且精细滤波器通道由第二晶片的表面中的每个围绕孔的凹部限定。

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