公开(公告)号：US08208710B2

公开(公告)日：2012-06-26

申请号：US13156928

申请日：2011-06-09

申请人： Nathan K. Weiner ,  Patrick J. Odoy ,  Eric Schultz ,  Mark Jones ,  James T. Overbeck ,  Herman DeWeerd ,  David A. Stura ,  Albert K. Bukys ,  Tim J. Woolaver ,  Thomas P. Regan ,  David Bradbury ,  Eric E. McKenzie ,  Roger DiPaolo ,  Christopher Miles ,  Joel M. Katz ,  Ksenia Oleinik-Ovod

发明人： Nathan K. Weiner ,  Patrick J. Odoy ,  Eric Schultz ,  Mark Jones ,  James T. Overbeck ,  Herman DeWeerd ,  David A. Stura ,  Albert K. Bukys ,  Tim J. Woolaver ,  Thomas P. Regan ,  David Bradbury ,  Eric E. McKenzie ,  Roger DiPaolo ,  Christopher Miles ,  Joel M. Katz ,  Ksenia Oleinik-Ovod

IPC分类号： G06K9/00

CPC分类号： G01N21/6428 ,  G01N21/253 ,  G01N21/6452 ,  G01N2021/6471

摘要： An embodiment of a scanning system is described including optical elements that direct an excitation beam at a probe array, detectors that receive reflected intensity data responsive to the excitation beam, where the reflected intensity data is responsive to a focusing distance between an optical element and the probe array, a transport frame that adjusts the focusing distance in a direction with respect to the probe array, an auto-focuser that determines a best plane of focus based upon characteristics of the reflected intensity data of at least two focusing distances where the detectors further receive pixel intensity values based upon detected emissions from a plurality of probe features disposed on the probe array at the best plane of focus, and an image generator that associates each of the pixel intensity values with at least one image pixel position of a probe array based upon one or more position correction values.

摘要翻译： 描述了扫描系统的实施例，其包括将激发光束引导到探针阵列的光学元件，响应于激发光束接收反射光强数据的检测器，其中反射光强度数据响应于光学元件和 探针阵列，调整相对于探针阵列的方向上的聚焦距离的传输框架，基于至少两个聚焦距离的反射强度数据的特性确定最佳聚焦距离的自动对焦器，其中检测器进一步 基于在最佳焦点平面上设置在探针阵列上的多个探针特征的检测到的发射来接收像素强度值，以及图像生成器，其将每个像素强度值与探针阵列的至少一个图像像素位置相关联 一个或多个位置校正值。

公开(公告)号：US20120235016A1

公开(公告)日：2012-09-20

申请号：US13480888

申请日：2012-05-25

申请人： Nathan K. Weiner ,  Patrick J. Odoy ,  Eric Schultz ,  Mark Jones ,  James Overbeck ,  Herman Deweerd ,  David A. Stura ,  Albert Bukys ,  Tim Woolaver ,  Thomas P. Regan ,  David Bradbury ,  Eric Earl McKenzie ,  Roger DiPaolo ,  Christopher Miles ,  Joel Katz ,  Ksenia Oleinik-Ovod

发明人： Nathan K. Weiner ,  Patrick J. Odoy ,  Eric Schultz ,  Mark Jones ,  James Overbeck ,  Herman Deweerd ,  David A. Stura ,  Albert Bukys ,  Tim Woolaver ,  Thomas P. Regan ,  David Bradbury ,  Eric Earl McKenzie ,  Roger DiPaolo ,  Christopher Miles ,  Joel Katz ,  Ksenia Oleinik-Ovod

IPC分类号： H01L27/146

CPC分类号： G01N21/6428 ,  G01N21/253 ,  G01N21/6452 ,  G01N2021/6471

摘要： An embodiment of a scanning system is described including optical elements that direct an excitation beam at a probe array, detectors that receive reflected intensity data responsive to the excitation beam, where the reflected intensity data is responsive to a focusing distance between an optical element and the probe array, a transport frame that adjusts the focusing distance in a direction with respect to the probe array, an auto-focuser that determines a best plane of focus based upon characteristics of the reflected intensity data of at least two focusing distances where the detectors further receive pixel intensity values based upon detected emissions from a plurality of probe features disposed on the probe array at the best plane of focus, and an image generator that associates each of the pixel intensity values with at least one image pixel position of a probe array based upon one or more position correction values.

摘要翻译： 描述了扫描系统的实施例，其包括将激发光束引导到探针阵列的光学元件，响应于激发光束接收反射光强数据的检测器，其中反射光强度数据响应于光学元件和 探针阵列，调整相对于探针阵列的方向上的聚焦距离的传输框架，基于至少两个聚焦距离的反射强度数据的特性确定最佳聚焦距离的自动对焦器，其中检测器进一步 基于在最佳焦点平面上设置在探针阵列上的多个探针特征的检测到的发射来接收像素强度值，以及图像生成器，其将每个像素强度值与探针阵列的至少一个图像像素位置相关联 一个或多个位置校正值。