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1.发明授权公开(公告)号：US07361909B2
公开(公告)日：2008-04-22
申请号：US11287503
申请日：2005-11-23
IPC分类号： H01J37/08
CPC分类号： H01J37/04
摘要： A method and apparatus for correcting drift of the beam irradiation position during automated FIB (focused ion beam) processing with a reference image-setting unit, an image read-in unit for reading in images of the reference image region during the FIB processing, an arithmetic-and-control unit for finding the direction and amount of image deviation between the subsequent images, and a beam deflection system-adjusting unit for correcting the beam deflection system by correcting the image deviation based on the deviation in response to the output from the arithmetic-and-control unit. The arithmetic-and-control unit optimizes the brightness or contrast of the reference image.
摘要翻译： 一种用于在使用参考图像设置单元的自动化FIB（聚焦离子束）处理期间校正光束照射位置漂移的方法和装置，用于在FIB处理期间读取参考图像区域的图像的图像读入单元， 算术和控制单元，用于找到随后的图像之间的图像偏差的方向和量;以及光束偏转系统调整单元，用于通过根据来自所述图像的输出的偏差校正图像偏差来校正光束偏转系统 算术和控制单元。 算术和控制单元优化参考图像的亮度或对比度。
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2.发明申请公开(公告)号：US20060138356A1
公开(公告)日：2006-06-29
申请号：US11287503
申请日：2005-11-23
IPC分类号： H01J37/08
CPC分类号： H01J37/04
摘要： A method and apparatus for correcting drift of the beam irradiation position during automated FIB (focused ion beam) processing with a reference image-setting unit, an image read-in unit for reading in images of the reference image region during the FIB processing, an arithmetic-and-control unit for finding the direction and amount of image deviation between the subsequent images, and a beam deflection system-adjusting unit for correcting the beam deflection system by correcting the image deviation based on the deviation in response to the output from the arithmetic-and-control unit. The arithmetic-and-control unit optimizes the brightness or contrast of the reference image.
摘要翻译： 一种用于在使用参考图像设置单元的自动化FIB（聚焦离子束）处理期间校正光束照射位置漂移的方法和装置，用于在FIB处理期间读取参考图像区域的图像的图像读入单元， 算术和控制单元，用于找到随后的图像之间的图像偏差的方向和量;以及光束偏转系统调整单元，用于通过根据来自所述图像的输出的偏差校正图像偏差来校正光束偏转系统 算术和控制单元。 算术和控制单元优化参考图像的亮度或对比度。
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