公开(公告)号：US20060011237A1

公开(公告)日：2006-01-19

申请号：US10946031

申请日：2004-09-21

申请人： Stuart Tison ,  Sandeep Sukumaran ,  James Barker

发明人： Stuart Tison ,  Sandeep Sukumaran ,  James Barker

IPC分类号： F16K31/36

CPC分类号： G01F25/0038 ,  G01F25/0053 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/7761

摘要： Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements taken within this volume. The various measurements taken during the interval may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint.

摘要翻译： 公开了用于流量验证和质量流量控制器验证的系统和方法。 可以命令质量流量控制器进行指定的流量和流量测量。 在间隔期间，气体积聚在第一个体积中，并在该体积内进行测量。 然后可以使用间隔期间进行的各种测量来计算流量。 流量又可用于确定质量流量控制器相对于设定点的精度。

公开(公告)号：US20060005882A1

公开(公告)日：2006-01-12

申请号：US10887591

申请日：2004-07-09

申请人： Stuart Tison ,  Sandeep Sukumaran ,  James Barker

发明人： Stuart Tison ,  Sandeep Sukumaran ,  James Barker

IPC分类号： G05D7/06

CPC分类号： G01F25/0038 ,  G01F25/0053 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/7761

摘要： Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is accumulated in a first volume and while measurements are taken within this volume. Gas may then flow into a second volume while measurements are taken. The various measurements taken during the two intervals may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint. Additionally, these systems and methods may utilize only one volume to perform flow verification by flowing gas into this volume, taking measurements, and calculating the flow rate based only upon this set of measurements.

摘要翻译： 公开了用于流量验证和质量流量控制器验证的系统和方法。 可以命令质量流量控制器进行指定的流量和流量测量。 气体在第一卷中积累，并且在该体积内进行测量。 然后在进行测量时，气体可以流入第二容积。 然后可以使用在两个间隔期间进行的各种测量来计算流量。 流量又可用于确定质量流量控制器相对于设定点的精度。 此外，这些系统和方法可以仅利用一个体积来通过将气体流入该体积进行流动验证，进行测量，并且仅基于该组测量来计算流量。

公开(公告)号：US07424895B2

公开(公告)日：2008-09-16

申请号：US10946031

申请日：2004-09-21

申请人： Stuart A. Tison ,  Sandeep Sukumaran ,  James Barker

发明人： Stuart A. Tison ,  Sandeep Sukumaran ,  James Barker

IPC分类号： G01F1/34

CPC分类号： G01F25/0038 ,  G01F25/0053 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/7761

摘要： Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements taken within this volume. The various measurements taken during the interval may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint.

摘要翻译： 公开了用于流量验证和质量流量控制器验证的系统和方法。 可以命令质量流量控制器进行指定的流量和流量测量。 在间隔期间，气体积聚在第一个体积中，并在该体积内进行测量。 然后可以使用间隔期间进行的各种测量来计算流量。 流量又可用于确定质量流量控制器相对于设定点的精度。

公开(公告)号：US07412986B2

公开(公告)日：2008-08-19

申请号：US10887591

申请日：2004-07-09

申请人： Stuart A. Tison ,  Sandeep Sukumaran ,  James Barker

发明人： Stuart A. Tison ,  Sandeep Sukumaran ,  James Barker

IPC分类号： G01F1/34

CPC分类号： G01F25/0038 ,  G01F25/0053 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/7761

摘要： Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is accumulated in a first volume and while measurements are taken within this volume. Gas may then flow into a second volume while measurements are taken. The various measurements taken during the two intervals may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint. Additionally, these systems and methods may utilize only one volume to perform flow verification by flowing gas into this volume, taking measurements, and calculating the flow rate based only upon this set of measurements.

摘要翻译： 公开了用于流量验证和质量流量控制器验证的系统和方法。 可以命令质量流量控制器进行指定的流量和流量测量。 气体在第一卷中积累，并且在该体积内进行测量。 然后在进行测量时，气体可以流入第二容积。 然后可以使用在两个间隔期间进行的各种测量来计算流量。 流量又可用于确定质量流量控制器相对于设定点的精度。 此外，这些系统和方法可以仅利用一个体积来通过将气体流入该体积进行流动验证，进行测量，并且仅基于该组测量来计算流量。