公开(公告)号：US07261826B2

公开(公告)日：2007-08-28

申请号：US10766087

申请日：2004-01-27

申请人： Scott Adams ,  Tim Davis ,  Scott Miller ,  Kevin Shaw ,  John Matthew Chong ,  Seung Bok (Chris) Lee

发明人： Scott Adams ,  Tim Davis ,  Scott Miller ,  Kevin Shaw ,  John Matthew Chong ,  Seung Bok (Chris) Lee

IPC分类号： C23F1/00 ,  H01L21/00

CPC分类号： H02N1/008 ,  H01H67/22 ,  H01H2001/0068

摘要： A method and apparatus are described that may be used to provide decoupled rotation of structures about different pivot points. The apparatus may include one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended. Separate movable blades may be provided for each degree of freedom. When voltage is applied between the fixed and movable blades, the electrostatic attraction generates a force attracting movable blades toward blades that are fixed relative to the moveable blades, causing a structure to rotate about the flexures. The angle of rotation that results may be related to the size, number and spacing of the blades, the stiffness of the flexures and the magnitude of the voltage difference applied to the blades. The blades are fabricated using deep silicon etching.

摘要翻译： 描述了可用于提供关于不同枢转点的结构的解耦旋转的方法和装置。 该装置可以包括安装到框架或基板的一个或多个固定刀片，安装到要移动的每个结构的一个或多个可动刀片以及悬挂结构的挠曲件。 可以为每个自由度设置单独的可动叶片。 当在固定刀片和可动刀片之间施加电压时，静电引力产生向可移动刀片固定的刀片吸引可动刀片的力，导致结构围绕弯曲部旋转。 导致的旋转角度可能与叶片的尺寸，数量和间距，弯曲刚度和施加到叶片的电压差的大小有关。 使用深硅蚀刻制造刀片。

公开(公告)号：US06753638B2

公开(公告)日：2004-06-22

申请号：US09775491

申请日：2001-02-02

申请人： Scott Adams ,  Tim Davis ,  Scott Miller ,  Kevin Shaw ,  John Matthew Chong ,  Seung Bok (Chris) Lee

发明人： Scott Adams ,  Tim Davis ,  Scott Miller ,  Kevin Shaw ,  John Matthew Chong ,  Seung Bok (Chris) Lee

IPC分类号： G02B2610

CPC分类号： H02N1/008 ,  H01H67/22 ,  H01H2001/0068

摘要： A method and apparatus are described that may be used to provide decoupled rotation of structures about different pivot points. The apparatus may include one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended. Separate movable blades may be provided for each degree of freedom. When voltage is applied between the fixed and movable blades, the electrostatic attraction generates a force attracting movable blades toward blades that are fixed relative to the moveable blades, causing a structure to rotate about the flexures. The angle of rotation that results may be related to the size, number and spacing of the blades, the stiffness of the flexures and the magnitude of the voltage difference applied to the blades. The blades are fabricated using deep silicon etching.

摘要翻译： 描述了可用于提供关于不同枢转点的结构的解耦旋转的方法和装置。 该装置可以包括安装到框架或基板的一个或多个固定刀片，安装到要移动的每个结构的一个或多个可动刀片以及悬挂结构的挠曲件。 可以为每个自由度设置单独的可动叶片。 当在固定刀片和可动刀片之间施加电压时，静电引力产生向可移动刀片固定的刀片吸引可动刀片的力，导致结构围绕弯曲部旋转。 导致的旋转角度可能与叶片的尺寸，数量和间距，弯曲刚度和施加到叶片的电压差的大小有关。 使用深硅蚀刻制造刀片。