公开(公告)号：US06448554B1

公开(公告)日：2002-09-10

申请号：US09321853

申请日：1999-05-28

申请人： Masakazu Aono ,  Takane Kobayashi

发明人： Masakazu Aono ,  Takane Kobayashi

IPC分类号： H01J37252

CPC分类号： H01J49/40

摘要： From an ion source and accelerator an ion beam is generated, this ion beam is let go through a circular hole bored in the center of a detector and orifices to irradiate a sample in a sample chamber. The detector detects particles scattered from the sample and arrived at the detector through the orifices. With exhaust units and orifices, the region surrounding the detector is exhausted to be a prescribed degree of vacuum of higher vacuum than the inside of the sample chamber.

摘要翻译： 从离子源和加速器产生离子束，该离子束通过在检测器中心钻孔的孔，并且孔口照射样品室中的样品。 检测器检测从样品散射的颗粒，并通过孔抵达检测器。 利用排气单元和孔口，检测器周围的区域被排出为比样品室内部更高真空度的规定的真空度。