公开(公告)号：US6148909A

公开(公告)日：2000-11-21

申请号：US236371

申请日：1999-01-25

申请人： Masashi Osanai ,  Shunsuke Miyamoto ,  Tomohisa Sato ,  Hiroaki Takechi ,  Tsutomu Hatanaka ,  Norio Takahashi ,  Toshiyuki Kamei ,  Takumi Sugihara ,  Isao Shibata ,  Hironori Akiba

发明人： Masashi Osanai ,  Shunsuke Miyamoto ,  Tomohisa Sato ,  Hiroaki Takechi ,  Tsutomu Hatanaka ,  Norio Takahashi ,  Toshiyuki Kamei ,  Takumi Sugihara ,  Isao Shibata ,  Hironori Akiba

IPC分类号： F04B49/06 ,  F04B41/00 ,  F25B1/00 ,  G05D23/00 ,  G05D23/19 ,  F25B29/00

CPC分类号： G05D23/1919

摘要： A temperature control system which performs control of an object whose temperature is to be controlled as accurately as possible. The system comprises: a chiller located in a fluid circulating and supplying system, for cooling a thermal fluid returning from a vacuum chamber, a first flow control valve located in the fluid circulating and supplying system in a position between the chiller and the vacuum chamber, a bypass passage for splitting and supplying thermal fluid returning from the vacuum chamber to a position between the first flow control valve and the vacuum chamber, before it reaches the chiller, a second flow control valve located in the bypass passage, and a halogen lamp heater located in the fluid circulating and supplying system in a position between a confluence point of the bypass passage and the vacuum chamber, for adjusting the temperature of the thermal fluid passing therethrough to a set temperature.

摘要翻译： 一种温度控制系统，其对要温度控制的物体尽可能准确地进行控制。 该系统包括：位于流体循环供应系统中的冷却器，用于冷却从真空室返回的热流体;位于冷却器和真空室之间位置的流体循环供应系统中的第一流量控制阀， 旁通通道，用于将从真空室返回的热流体分流并供应到第一流量控制阀和真空室之间的位置，到达冷却器之前，位于旁路通道中的第二流量控制阀和卤素灯加热器 位于流体循环和供给系统中的位于旁路通道的汇合点和真空室之间的位置，用于将通过其的热流体的温度调节到设定温度。