公开(公告)号：US20200244192A1

公开(公告)日：2020-07-30

申请号：US15762052

申请日：2017-08-29

Applicant: Christian Wolfgang EHMANN ,  Britta SPÄH ,  Martin AENIS ,  Timo ADLER ,  Applied Materials, Inc.

Inventor： Christian Wolfgang EHMANN ,  Britta SPÄH ,  Martin AENIS ,  Timo ADLER

IPC: H02N15/00 ,  H02K7/09 ,  H02K41/03 ,  H01L21/68 ,  F16C32/04

Abstract: An apparatus for holding, positioning and/or moving an object is described. The apparatus includes a base, and a carrier which is movable relative to the base. The apparatus further includes at least three magnetic bearings, by means of which the carrier is supported on the base in a contactless manner such that the carrier can be displaced with respect to at least one predefined direction, wherein at least two of the magnetic bearings are configured as actively controllable magnetic bearings. The apparatus has at least one damping unit, which is fixed to the carrier or to the base.

公开(公告)号：US11139759B2

公开(公告)日：2021-10-05

申请号：US15762052

申请日：2017-08-29

Applicant: Christian Wolfgang Ehmann ,  Britta Späh ,  Martin Aenis ,  Timo Adler ,  Applied Materials, Inc.

Inventor： Christian Wolfgang Ehmann ,  Britta Späh ,  Martin Aenis ,  Timo Adler

IPC: H02N15/00 ,  H01L21/68 ,  H02K41/03 ,  H02K7/09 ,  F16C32/04

Abstract: An apparatus for holding, positioning and/or moving an object is described. The apparatus includes a base, and a carrier which is movable relative to the base. The apparatus further includes at least three magnetic bearings, by means of which the carrier is supported on the base in a contactless manner such that the carrier can be displaced with respect to at least one predefined direction, wherein at least two of the magnetic bearings are configured as actively controllable magnetic bearings. The apparatus has at least one damping unit, which is fixed to the carrier or to the base.