公开(公告)号：US11139759B2

公开(公告)日：2021-10-05

申请号：US15762052

申请日：2017-08-29

Applicant: Christian Wolfgang Ehmann ,  Britta Späh ,  Martin Aenis ,  Timo Adler ,  Applied Materials, Inc.

Inventor： Christian Wolfgang Ehmann ,  Britta Späh ,  Martin Aenis ,  Timo Adler

IPC: H02N15/00 ,  H01L21/68 ,  H02K41/03 ,  H02K7/09 ,  F16C32/04

Abstract: An apparatus for holding, positioning and/or moving an object is described. The apparatus includes a base, and a carrier which is movable relative to the base. The apparatus further includes at least three magnetic bearings, by means of which the carrier is supported on the base in a contactless manner such that the carrier can be displaced with respect to at least one predefined direction, wherein at least two of the magnetic bearings are configured as actively controllable magnetic bearings. The apparatus has at least one damping unit, which is fixed to the carrier or to the base.

公开(公告)号：US20120121371A1

公开(公告)日：2012-05-17

申请号：US13266648

申请日：2010-05-26

Applicant: Martin Aenis ,  Christof Klesen ,  Ulrich Oldendorf ,  Thomas Sebald

Inventor： Martin Aenis ,  Christof Klesen ,  Ulrich Oldendorf ,  Thomas Sebald

IPC: B65G47/74

CPC classification number: H01L21/67766 ,  H01L21/67742

Abstract: A device for particle free handling of substrates of micro technology within mini environments under clean room conditions works friction free and thus particle free. One component of the device is movable relative to an other component in at least the x-, y-, z-axes and a Φ-direction and supported and driven along each of the axes and the direction contactless electromagnetically. Transmission of energy for bearing and driving the one component is effected contactless. The device includes at least one active component and at least one passive component. A movable active component may be guided on the fixed passive component by a magnet bearing, and a drive motor which rides with the active component may be coupled with an energy supply over an electromagnetic coupling.

Abstract translation: 在洁净室条件下，在微型环境中无微粒子处理微技术基板的装置无摩擦，因此无颗粒。 该装置的一个部件至少在x轴，y轴，z轴和Φ方向上相对于另一部件是可移动的，并且沿着每个轴和方向非电磁地被支撑和驱动。 用于轴承和驱动一个部件的能量传输是非接触式的。 该装置包括至少一个有源部件和至少一个无源部件。 可移动有源部件可以通过磁体轴承在固定的无源部件上引导，并且与有源部件相乘的驱动马达可以通过电磁耦合与能量供给装置联接。

公开(公告)号：US20200244192A1

公开(公告)日：2020-07-30

申请号：US15762052

申请日：2017-08-29

Applicant: Christian Wolfgang EHMANN ,  Britta SPÄH ,  Martin AENIS ,  Timo ADLER ,  Applied Materials, Inc.

Inventor： Christian Wolfgang EHMANN ,  Britta SPÄH ,  Martin AENIS ,  Timo ADLER

IPC: H02N15/00 ,  H02K7/09 ,  H02K41/03 ,  H01L21/68 ,  F16C32/04

Abstract: An apparatus for holding, positioning and/or moving an object is described. The apparatus includes a base, and a carrier which is movable relative to the base. The apparatus further includes at least three magnetic bearings, by means of which the carrier is supported on the base in a contactless manner such that the carrier can be displaced with respect to at least one predefined direction, wherein at least two of the magnetic bearings are configured as actively controllable magnetic bearings. The apparatus has at least one damping unit, which is fixed to the carrier or to the base.