Abstract:
Disclosed are a process module, a fabrication method thereof, and a substrate processing method using the process module. The process module includes a structure in which cell substrates are fixed on a carrier member by an adhesive according to a preset alignment standard. The fabrication method includes aligning the cell substrates according to a preset alignment standard, applying an adhesive to at least one of surfaces facing each other between the cell substrates and the carrier member, and attaching the cell substrates to the carrier member by using the adhesive. The substrate processing method includes performing the substrate processing process of the cell substrates at the same time by using the process module integrated with the cell substrates. The substrate processing method selectively includes calibrating the alignment standard for the cell substrates in the substrate processing process to an alignment state of the cell substrates in the process module.
Abstract:
A method of providing a routing protocol in a sensor network includes the steps of: initializing a routing table and searching a network device of a node to initialize a host; opening a socket when there is a request for forwarding of an IP (Internet Protocol) packet from an upper layer or when there is a request through the network device; determining whether there is the IP packet forwarding request of the upper layer node or whether the packet is received from the network device; if there is the IP packet forwarding request of the upper layer, searching the routing table, and determining whether or not there is a destination node which intends to transmit the packet, and returning to a main loop if there is the destination node; and if the packet is received through the network device, determining types of the received packets and performing RREQ (route request) process, IDLE process, RREP (route reply) process, RERR (route error) process, and RREP_ACK (route reply acknowledgement) process.