公开(公告)号：US06184517B2

公开(公告)日：2001-02-06

申请号：US09061848

申请日：1998-04-18

申请人： Tsuguo Sawada ,  Takehiko Kitamori ,  Toshitsugu Ueda ,  Seiichi Naitou ,  Hisao Takahara ,  Yukihiko Takamatsu

发明人： Tsuguo Sawada ,  Takehiko Kitamori ,  Toshitsugu Ueda ,  Seiichi Naitou ,  Hisao Takahara ,  Yukihiko Takamatsu

IPC分类号： G01V800

CPC分类号： G01N15/0205 ,  G01N21/71

摘要： A particle analyzer system that reduces size and cost, wherein particles are introduced into a cell, then the particles are irradiate in the cell with a laser beam, then atomic emission of the particles generated by the irradiation of the laser beam is transmitted, then a spectrum is obtained of the photo emission so transmitted, and the spectrum of the photo emission is detected and the wavelength of the laser beam is, other than the wavelength of the emission of the particles, is used to provide a filter to block the intrusion of the wavelength of the laser beam in a stage proceeding the photo emission.

摘要翻译： 一种降低尺寸和成本的颗粒分析仪系统，其中将颗粒引入电池中，然后使用激光束将颗粒照射在电池中，然后传输由激光束照射产生的颗粒的原子发射，然后将 获得如此透射的光发射的光谱，并且检测光发射的光谱，并且除了颗粒的发射波长之外，激光束的波长被用于提供滤光器以阻止 在进行光发射的阶段中的激光束的波长。

公开(公告)号：US5510611A

公开(公告)日：1996-04-23

申请号：US329895

申请日：1994-10-27

申请人： Hisao Takahara ,  Yukihiko Takamatsu ,  Yasuhiro Tanibata

发明人： Hisao Takahara ,  Yukihiko Takamatsu ,  Yasuhiro Tanibata

IPC分类号： G01N21/71 ,  G01J3/50

CPC分类号： G01N21/718

摘要： A particle component analyzing apparatus and method using a microwave induced plasma to perform element analysis of particles, such as particles existing in a clean room; wherein an aspirator scans a filter to draw particles collected on the filter, and using the microwaves to excite the drawn particles to cause generation of an emission spectrum having a plurality of wavelengths indicative of the elements of the particle, which are measured by a plurality of monochrometers, and converted by an optoelectric converter into electrical signals to identify the different elements in the particle. The invention uses means for obtaining the cube roots of the outputs from the optoelectric converter. By obtaining the ratio of cube root outputs corresponding to the diameters of particles preprocessed into spherical shape of a reference element and of an element to be measured, and then by obtaining the cube root of an output from an element in a measurement sample and by multiplying it by the ratio of cube roots with respect to the reference element, there is obtained an equivalent particle diameter corrected for differences in sensitivity between the elements. Means are provided for determining the composition of a particle from the emission spectrum and for calculating the composition ratios of a plurality of elements from the different emission intensities.

摘要翻译： 一种使用微波感应等离子体进行颗粒的元素分析的粒子成分分析装置和方法，例如存在于洁净室内的粒子; 其中吸气器扫描过滤器以吸收在过滤器上收集的颗粒，并且使用微波来激发所拉伸的颗粒以产生具有指示颗粒的元素的多个波长的发射光谱，所述多个波长由多个 单色仪，并由光电转换器转换成电信号，以识别颗粒中的不同元素。 本发明使用用于获得来自光电转换器的输出的立方根的装置。 通过获得对应于预处理为参考元素和要测量元素的球形的粒子的直径的立方根输出的比率，然后通过获得来自测量样本中的元素的输出的立方根，并乘以 通过立方根相对于参考元素的比率，获得了针对元件之间的灵敏度差异校正的等效粒径。 提供了用于根据发射光谱确定颗粒的组成并根据不同发射强度计算多个元素的组成比的装置。

公开(公告)号：US5665964A

公开(公告)日：1997-09-09

申请号：US775449

申请日：1996-12-30

申请人： Hisao Takahara ,  Yukihiko Takamatsu ,  Yasuhiro Tanibata

发明人： Hisao Takahara ,  Yukihiko Takamatsu ,  Yasuhiro Tanibata

IPC分类号： G01N21/71 ,  G01J3/50

CPC分类号： G01N21/718

摘要： A particle component analyzing apparatus and method using a microwave induced plasma to perform element analysis of particles, such as particles existing in a clean room; wherein an aspirator scans a filter to draw particles collected on the filter, and using the microwaves to excite the drawn particles to cause generation of an emission spectrum having a plurality of wavelengths indicative of the elements of the particle, which are measured by a plurality of monochrometers, and converted by an optoelectric converter into electrical signals to identify the different elements in the particle. The invention uses means for obtaining the cube roots of the outputs from the optoelectric converter. By obtaining the ratio of cube root outputs corresponding to the diameters of particles preprocessed into spherical shape of a reference element and of an element to be measured, and then by obtaining the cube root of an output from an element in a measurement sample and by multiplying it by the ratio of cube roots with respect to the reference element, there is obtained an equivalent particle diameter corrected for differences in sensitivity between the elements. Means are provided for determining the composition of a particle from the emission spectrum and for calculating the composition ratios of a plurality of elements from the different emission intensities.

摘要翻译： 一种使用微波感应等离子体进行颗粒的元素分析的粒子成分分析装置和方法，例如存在于洁净室内的粒子; 其中吸气器扫描过滤器以吸收在过滤器上收集的颗粒，并且使用微波来激发所拉伸的颗粒，以产生具有指示颗粒的元素的多个波长的发射光谱，该多个波长由多个 单色仪，并由光电转换器转换成电信号，以识别颗粒中的不同元素。 本发明使用用于获得来自光电转换器的输出的立方根的装置。 通过获得对应于预处理为参考元素和要测量元素的球形的粒子的直径的立方根输出的比率，然后通过获得来自测量样本中的元素的输出的立方根，并乘以 通过立方根相对于参考元素的比率，获得了针对元件之间的灵敏度差异校正的等效粒径。 提供了用于根据发射光谱确定颗粒的组成并根据不同发射强度计算多个元素的组成比的装置。