公开(公告)号：US20230135358A1

公开(公告)日：2023-05-04

申请号：US18049853

申请日：2022-10-26

Applicant: AGC Inc.

Inventor： Mikio NAGANO ,  Seiji INABA ,  Rikiya KADO ,  Kiyoshi TAMAI ,  Yuha KOBAYASHI

IPC: C03C3/085 ,  C03C3/062 ,  H01L21/56

Abstract: Glass contains, in mol percentage on an oxide basis, SiO2: 35% to 60%, B2O3: 0.8% to 8%, Al2O3: 6% to 21%, and MgO: 17% to 44%. Additionally, (MgO/Al2O3)≥1 is satisfied, a measured Madelung constant m calculated by an expression (1A) is equal to or larger than 1.05, and a thermal expansion factor as a ratio of a measured value α of a linear thermal expansion coefficient to a calculated value αcal of a linear thermal expansion coefficient calculated from composition is equal to or smaller than 0.7. Herein, E is a measured value of a Young's modulus of the glass, Vp is an average atomic packing factor of the glass, and Gt is average bond dissociation energy of the glass.

公开(公告)号：US20210032155A1

公开(公告)日：2021-02-04

申请号：US16941631

申请日：2020-07-29

Applicant: AGC Inc.

Inventor： Seiji INABA ,  Yasunari SAITO ,  Kiyoshi TAMAI ,  Kazutaka ONO ,  Yuha KOBAYASHI

IPC: C03C3/087 ,  C03C3/085 ,  C03C3/097 ,  C03C3/095 ,  C03C3/091 ,  H01L23/15

Abstract: A supporting glass substrate has a ratio of a Young's modulus (GPa) to a density (g/cm3) that is 37.0 (GPa·cm3/g) or more and the ratio has a value larger than a ratio calculation value, the ratio calculation value being a ratio of a Young's modulus (GPa) calculated from a composition to a density (g/cm3). The ratio calculation value is represented by the following expression: α=2·Σ{(Vi·Gi)/Mi·Xi}, where, in the expression, Vi is a filling parameter of a metal oxide contained in the supporting glass substrate, Gi is a dissociation energy of a metal oxide contained in the supporting glass substrate. Mi is a molecular weight of a metal oxide contained in the supporting glass substrate, and Xi is a molar ratio of a metal oxide contained in the supporting glass substrate.

公开(公告)号：US20220144685A1

公开(公告)日：2022-05-12

申请号：US17585787

申请日：2022-01-27

Applicant: AGC Inc.

Inventor： Mikio NAGANO ,  Seiji INABA ,  Yasunari SAITO ,  Kiyoshi TAMAI ,  Kazutaka ONO ,  Yuha KOBAYASHI

IPC: C03C3/097 ,  C03C3/095 ,  C03C3/091 ,  C03C3/085 ,  C03C3/087 ,  H01L21/683

Abstract: Suppressing deflection and reducing weight are to be achieved. A supporting glass substrate has a ratio of a Young's modulus (GPa) to a density (g/cm3) that is 37.0 (GPa·cm3/g) or more and the ratio has a value larger than a ratio calculation value, the ratio calculation value being a ratio of a Young's modulus (GPa) calculated from a composition to a density (g/cm3). The ratio calculation value is represented by the following expression: α=2·Σ{(Vi·Gi)/Mi·Xi}, where, in the expression, Vi is a filling parameter of a metal oxide contained in the supporting glass substrate, Gi is a dissociation energy of a metal oxide contained in the supporting glass substrate, Mi is a molecular weight of a metal oxide contained in the supporting glass substrate, and Xi is a molar ratio of a metal oxide contained in the supporting glass substrate.

公开(公告)号：US20210147279A1

公开(公告)日：2021-05-20

申请号：US17093121

申请日：2020-11-09

Applicant: AGC Inc.

Inventor： Yusuke KOBAYASHI ,  Izuru KASHIMA ,  Kazutaka ONO ,  Seiji INABA ,  Hirofumi YAMAMOTO ,  Kiyoshi TAMAI

IPC: C03C3/087 ,  C03C4/18 ,  C03C21/00 ,  B32B17/10

Abstract: A supporting glass substrate includes a compression stress layer on a surface thereof, and has an average thermal expansion coefficient at 50° C. to 200° C. that is 7 ppm/° C. to 15 ppm/° C., an internal tensile stress that is 5 MPa to 55 MPa, and a depth of the compression stress layer that is 10 μm to 60 μm.