公开(公告)号：US20210293535A1

公开(公告)日：2021-09-23

申请号：US16826257

申请日：2020-03-22

Applicant: ANALOG DEVICES, INC.

Inventor： Shrenik DELIWALA ,  Paul W. STEVENS ,  William Edward O'MARA

IPC: G01B11/27 ,  H01L29/872 ,  H01L29/66

Abstract: Aspects of the embodiments are directed to non-contact systems, methods and devices for optical detection of objects in space at precise angles. This method involves the design and fabrication of photodiode arrays for measuring angular response using self-aligned Schottky platinum silicide (PtSi) PIN photodiodes (PN-diodes with an intrinsic layer sandwiched in between) that provide linear angular measurements from incident light in multiple dimensions. A self-aligned device is defined as one in which is not sensitive to photomask layer registrations. This design eliminates device offset between “left” and right” channels for normal incident light as compared to more conventional PIN diode constructions.