公开(公告)号：US20210176831A1

公开(公告)日：2021-06-10

申请号：US17106735

申请日：2020-11-30

Applicant: APPLIED MATERIALS, INC.

Inventor： Pingyan LEI ,  Dien-Yeh WU ,  Jallepally RAVI ,  Manjunatha KOPPA ,  Ambarish TOORIHAL ,  Sandesh YADAMANE ,  Vinod Konda PURATHE ,  Xiaoxiong YUAN

IPC: H05B3/48 ,  C23C14/54 ,  C23C16/458 ,  C23C16/455 ,  H05B3/14

Abstract: Embodiments of a lid heater for a deposition chamber are provided herein. In some embodiments, a lid heater for a deposition chamber includes a ceramic heater body having a first side opposite a second side, wherein the ceramic heater body includes a first plurality of gas channels extending from one or more first gas inlets on the first side, wherein each of the one or more first gas inlets extend to a plurality of first gas outlets on the second side; a heating element embedded in the ceramic heater body; and an RF electrode embedded in the ceramic heater body proximate the second side, wherein the first plurality of gas channels extend through the RF electrode.