公开(公告)号：US20200310001A1

公开(公告)日：2020-10-01

申请号：US16820338

申请日：2020-03-16

Applicant: APPLIED MATERIALS, INC.

Inventor： Alexander BERGER ,  Cheng-Hsuan CHOU ,  David KNAPP

IPC: G02B1/16 ,  G02B1/14

Abstract: Described herein is a method of depositing a conformal, optically transparent coating onto a surface of one or more internal components that are enclosed within an assembled device using a non-line-of-sight deposition process without altering a structure of the assembled device or impacting functionality of the assembled device. Also described is an assembled device including one or more internal components enclosed within the assembled device and a coating deposited onto a surface of the internal components enclosed within the assembled device, where the coating is a conformal, optically transparent coating that is resistant to corrosion by at least one of fluorine-, chlorine-, sulfur-, hydrogen-, bromine-, or nitrogen-based acids and that does not negatively impact functionality of the internal components.