公开(公告)号：US20170173521A1

公开(公告)日：2017-06-22

申请号：US15449226

申请日：2017-03-03

Applicant: APPLIED MATERIALS, INC.

Inventor： Colin John DICKINSON ,  Mehran MOALEM ,  Daniel O. CLARK

IPC: B01D53/32 ,  C23C16/44

Abstract: Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, a method for treating an exhaust gas in an exhaust conduit of a substrate processing system includes: flowing an exhaust gas and a reagent gas into an exhaust conduit of a substrate processing system; injecting a non-reactive gas into the exhaust conduit to maintain a desired pressure in the exhaust conduit for conversion of the exhaust gas; and forming a plasma from the exhaust gas and reagent gas, subsequent to injecting the non-reactive gas, to convert the exhaust gas to abatable byproduct gases.