公开(公告)号：US20230197498A1

公开(公告)日：2023-06-22

申请号：US17554404

申请日：2021-12-17

Applicant: APPLIED MATERIALS, INC.

Inventor： Rajkumar Thanu ,  Pei-Chen Wu ,  William Laceky ,  Matvey Farber ,  Jeffrey C. Hudgens

IPC: H01L21/687 ,  B25J15/00 ,  H01L21/677 ,  B25J11/00

CPC classification number: H01L21/68707 ,  B25J11/0095 ,  B25J15/0019 ,  H01L21/67742

Abstract: Disclosed herein are embodiments of an electrostatic end effector, and methods of manufacturing the same. In one embodiment, an electrostatic end effector comprises a ceramic base, a first electrode layer coupled to the ceramic base, and a second electrode layer coupled to the ceramic base. The electrostatic end effector is configured to generate an electrostatic force upon a substrate responsive to a voltage applied to the first electrode. The electrostatic force upon the substrate may increase the friction force upon the substrate which may allow the end effector to accelerate at faster rates than current technologies allow without the substrate slipping on the end effector.

公开(公告)号：US20240075617A1

公开(公告)日：2024-03-07

申请号：US17903916

申请日：2022-09-06

Applicant: Applied Materials, Inc.

Inventor： Pei-Chen Wu ,  Rajkumar Thanu ,  Matvey Farber

IPC: B25J9/16

CPC classification number: B25J9/1664 ,  G05B2219/39001 ,  G05B2219/40519

Abstract: A method includes identifying a sequence of robot configurations associated with processing a plurality of substrates. The method further includes generating motion planning data comprising corresponding velocity data and corresponding acceleration data for each portion of a trajectory associated with the processing of the plurality of substrates. The method further includes causing a robot arm to be actuated based on the motion planning data.