公开(公告)号：US10340116B1

公开(公告)日：2019-07-02

申请号：US16007580

申请日：2018-06-13

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Ran Schleyen ,  Vladislav Kaplan ,  Shachar Paz

IPC: H01J37/22 ,  G06T7/00 ,  G06T5/00 ,  G06T5/50

Abstract: A method, computer program product and a system for imaging an area that includes an upper surface and hole. The method may include acquiring, by a charged particle imager, a first image of a first type of electrons of the area while the charged particle imager is at a first configuration; acquiring, by the charged particle imager, a second image of the first type of electrons of the area and a first image of a second type of electrons of the area while the charged particle imager is at a second configuration that differs from the first configuration; and generating a hybrid image of the area based on (i) a first image of the first type of electrons of the upper surface, (ii) an inter-image offset, and (iii) a first image of the second type of electrons of the bottom of the hole.