公开(公告)号：US20240192040A1

公开(公告)日：2024-06-13

申请号：US18532190

申请日：2023-12-07

Applicant: ASM IP Holding B.V

Inventor： Panagiota Arnou ,  Tom Van Kesteren ,  Mehmet Orhan Tas ,  Gido Van Der Star

IPC: G01F15/075 ,  C23C16/455 ,  C23C16/52

CPC classification number: G01F15/0755 ,  C23C16/45544 ,  C23C16/52

Abstract: In general the various aspects of the technology of the present disclosure relate to semiconductor processing, and particularly to monitoring the amount of chemicals consumed by a semiconductor manufacturing process.