公开(公告)号：US20210384046A1

公开(公告)日：2021-12-09

申请号：US17336494

申请日：2021-06-02

Applicant: ASM IP Holding B.V.

Inventor： Gijsbert Hendrik Ronner ,  Christianus G.M. de Ridder ,  Theodorus G.M. Oosterlaken ,  Klaas P. Boonstra ,  Jeroen de Jonge ,  Lucian Jdira ,  Chaggai Shmuel Ganani

IPC: H01L21/67 ,  B65G47/90

Abstract: The disclosure relates to a substrate processing apparatus for processing a plurality of substrates. The apparatus comprising a reactor mounted in the apparatus and configured for processing substrates and a reactor mover for moving the reactor for maintenance. The reactor mover is constructed and arranged with a lift to move the reactor to a lower height to allow for access to the reactor by a maintenance worker.