公开(公告)号：US20230099798A1

公开(公告)日：2023-03-30

申请号：US17950254

申请日：2022-09-22

Applicant: ASM IP Holding B.V.

Inventor： KyungEun Lee ,  HaRim Kim ,  IkDu Nam

IPC: C23C16/455

Abstract: A showerhead for supplying a gas includes a showerhead body having an upper surface and a lower surface opposite to the upper surface, and a plurality of through-holes formed in the showerhead body so that the gas passes through from the upper surface toward the lower surface, wherein a size of a cross-sectional area of each through-hole of the plurality of through-holes in the lower surface is the same, while the size of the cross-sectional area of each through-hole in the upper surface increases from a center of the showerhead toward an edge thereof.