公开(公告)号：USD990441S1

公开(公告)日：2023-06-27

申请号：US29806823

申请日：2021-09-07

Applicant: ASM IP Holding B.V.

Designer： JeongHo Lee ,  JinHo Shin ,  DaeYoun Kim ,  Jaehyun Kim ,  TaeWoong Kim

Abstract: FIG. 1 is a top perspective view of the gas flow control plate, showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top view thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is a front view thereof;
FIG. 6 is a back view thereof;
FIG. 7 is a right side view thereof; and,
FIG. 8 is a left side view thereof.

公开(公告)号：US20250034713A1

公开(公告)日：2025-01-30

申请号：US18782336

申请日：2024-07-24

Applicant: ASM IP Holding B.V.

Inventor： Jaehyun Kim

IPC: C23C16/458

Abstract: A lift pin includes a lift pin body arranged along a lift pin axis having an enlarged contact pad, a stem segment extending axially from the contact pad, a neck segment extending axially from the stem segment and separated from the contact pad by the stem segment of the lift pin body, and a base segment extending axially from the neck segment and separated from the stem segment by the neck segment. The base segment of the lift pin body has a base segment width, the neck segment of the lift pin body has a neck segment width, and the neck segment width is smaller than the base segment width to carry a lift pin weight with the lift pin body. Lift pin arrangements, semiconductor processing systems including lift pin arrangements, and methods of making lift pin arrangements for semiconductor processing systems are also described.