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公开(公告)号：US10451981B2
公开(公告)日：2019-10-22
申请号：US16343425
申请日：2017-09-08
Applicant: ASML NETHERLANDS B.V.
Inventor： Tiannan Guan , Jingshi Li , Miao Yu
IPC: G03F7/20
Abstract: A method of measuring wear of a substrate holder that is configured to hold a production substrate, the method includes: clamping a measurement substrate to the substrate holder; and measuring strain in the measurement substrate to generate a measurement result. The measurement substrate may have a body having dimensions similar to that of the production substrate; and a strain sensor in the body configured to measure strain in a peripheral portion of the measurement substrate.
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