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公开(公告)号：US12139436B2
公开(公告)日：2024-11-12
申请号：US17767179
申请日：2020-10-09
Applicant: ASML Netherlands B.V.
Inventor： Dietmar Uwe Herbert Trees , Edwin Johan Buis , Theodorus Wilhelmus Driessen , Benjamin Andrew Sams , Brandon Michael Johnson
Abstract: A method of manufacturing a nozzle for a droplet generator for a laser-produced plasma radiation source is disclosed. The method comprises disposing a glass capillary in a throughbore of a metal fitting, heating the metal fitting; and applying a pressure to the glass capillary such that the glass capillary conforms to the shape of, and forms a direct glass-to-metal seal with, the throughbore. Also disclosed is a nozzle for a droplet generator for a laser-produced plasma radiation source, and the radiation source itself, wherein the nozzle comprises the glass capillary for emitting fuel as droplets and the metal fitting for coupling the glass capillary to a body of the droplet generator, the glass capillary being conformed to a shape of a throughbore of the metal fitting, and wherein the glass capillary forms a direct glass-to-metal seal with the throughbore.
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公开(公告)号：US20240164004A1
公开(公告)日：2024-05-16
申请号：US18280917
申请日：2022-02-10
Applicant: ASML Netherlands B.V.
Inventor： Dietmar Uwe Herbert Trees , Theodorus Wilhelmus Driessen , Benjamin Andrew Sams , Edgardo Zamora Atencio , Ondrej Dvorak
CPC classification number: H05G2/006 , G03F7/70033 , H05G2/008
Abstract: A component for a target material transfer system for a laser-produced plasma radiation source and a method of manufacturing such a component are disclosed. The component, which may, for example, be a target material transfer line, a freeze valve, or a flow restrictor, or some combination of this functionality, is made up of a glass capillary body sealed with glass-to-metal seals at both of its ends to a respective metal fitting. The method of manufacturing involves heating the ends of the glass capillary and then forming them to conform with, and forming a glass-to-metal seal with, the interior contours of the respective channels in each of the metal fittings.
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3.发明公开公开(公告)号：US20230171869A1
公开(公告)日：2023-06-01
申请号：US17922056
申请日：2021-04-26
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Theodorus Wilhelmus Driessen , Herman Harry Borggreve , Brandon Michael Johnson , Vikas Giridhar Telkar
CPC classification number: H05G2/006 , B05B1/02 , G03F7/70033 , H05G2/008
Abstract: A droplet generator nozzle (800, 820/830) includes a metal body (802, 822), a metal fitting (812, 823/833) arranged adjacent to the metal body, and a capillary (804, 824/834) comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element (808 828/838) disposed within the metal body and coupled to the first end of the capillary and a fastener element (810) configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzle 830 of FIG. 8C represents the embodiment shown in FIG. 8B, in a cross section orthogonal to the cross section shown in FIG. 8B.
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Patent Agency Ranking
公开(公告)号：US20220363596A1
公开(公告)日：2022-11-17
申请号：US17767179
申请日：2020-10-09
Applicant: ASML Netherlands B.V.
Inventor： Dietmar Uwe Herbert Trees , Edwin Johan Buis , Theodorus Wilhelmus Driessen , Benjamin Andrew Sams , Brandon Michael Johnson
Abstract: A method of manufacturing a nozzle for a droplet generator for a laser-produced plasma radiation source is disclosed. The method comprises disposing a glass capillary in a throughbore of a metal fitting, heating the metal fitting; and applying a pressure to the glass capillary such that the glass capillary conforms to the shape of, and forms a direct glass-to-metal seal with, the throughbore. Also disclosed is a nozzle for a droplet generator for a laser-produced plasma radiation source, and the radiation source itself, wherein the nozzle comprises the glass capillary for emitting fuel as droplets and the metal fitting for coupling the glass capillary to a body of the droplet generator, the glass capillary being conformed to a shape of a throughbore of the metal fitting, and wherein the glass capillary forms a direct glass-to-metal seal with the throughbore.
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5.发明授权公开(公告)号：US12295088B2
公开(公告)日：2025-05-06
申请号：US17922056
申请日：2021-04-26
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Theodorus Wilhelmus Driessen , Herman Harry Borggreve , Brandon Michael Johnson , Vikas Giridhar Telkar
Abstract: A droplet generator nozzle (800, 820/830) includes a metal body (802, 822), a metal fitting (812, 823/833) arranged adjacent to the metal body, and a capillary (804, 824/834) comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element (808 828/838) disposed within the metal body and coupled to the first end of the capillary and a fastener element (810) configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzle 830 of FIG. 8C represents the embodiment shown in FIG. 8B, in a cross section orthogonal to the cross section shown in FIG. 8B.
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公开(公告)号：US20230279974A1
公开(公告)日：2023-09-07
申请号：US18010312
申请日：2021-07-13
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Vikas Giridhar Telkar , Alexander Igorevich Ershov , Theodorus Wilhelmus Driessen , Serkan Kincal
IPC: F16L17/02
Abstract: A target material supply apparatus includes: first and second fluid flow components (1122, 1126) that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle supply apparatus; and a coupling apparatus configured to seal the joint between the first and second fluid flow components. The coupling apparatus includes a gasket (1105) having an annular shape defining an inner opening that is a part of the axial flow path when seated and sealed. When the gasket is seated between the first and second fluid flow components to thereby seal the joint formed by attaching the first and second fluid flow components, pressure applied to the gasket from target material fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint. Optionally, a functional insert like e.g. a flow restrictor (1160) can be seated in the gasket.
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公开(公告)号：US12222050B2
公开(公告)日：2025-02-11
申请号：US18010312
申请日：2021-07-13
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Vikas Giridhar Telkar , Alexander Igorevich Ershov , Theodorus Wilhelmus Driessen , Serkan Kincal
Abstract: A target material supply apparatus includes: first and second fluid flow components (1122, 1126) that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle supply apparatus; and a coupling apparatus configured to seal the joint between the first and second fluid flow components. The coupling apparatus includes a gasket (1105) having an annular shape defining an inner opening that is a part of the axial flow path when seated and sealed. When the gasket is seated between the first and second fluid flow components to thereby seal the joint formed by attaching the first and second fluid flow components, pressure applied to the gasket from target material fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint. Optionally, a functional insert like e.g. a flow restrictor (1160) can be seated in the gasket.
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公开(公告)号：US20220213981A1
公开(公告)日：2022-07-07
申请号：US17609842
申请日：2020-05-22
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Theodorus Wilhelmus Driessen , Bob Rollinger
Abstract: A fluid control device (100) includes a structure (120) defining a valve cavity, a first fluid port (135), a second fluid port (140), and a third fluid port (145) configured to be fluidly coupled to a hermetic interior (105) of a body; and a plunger valve (130) within the valve cavity and configured to move between first and second modes while maintaining the hermetic interior of the body. In the first mode, the plunger valve is open such that a first fluid flow path is open between the hermetic interior and the first fluid port and fluid is free to pass between the first fluid port and the hermetic interior. In the second mode, the plunger valve is closed such that the first fluid port is blocked from the hermetic interior by the plunger valve and a second fluid flow path is open between the hermetic interior and the second fluid port.
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