公开(公告)号：US20250147438A1

公开(公告)日：2025-05-08

申请号：US18835287

申请日：2023-01-04

Applicant: ASML Netherlands B.V.

Inventor： Krishanu SHOME ,  Emily Rose FINAN ,  Kirill Urievich SOBOLEV ,  Joshua ADAMS ,  Jonathan S. RODNEY ,  Yuxiang LIN ,  Eric Brian CATEY

IPC: G03F7/00 ,  G02B5/00 ,  G02B26/00

Abstract: A system includes an imaging system, a spatial filter, and a detector. The system is configured to receive a plurality of diffraction orders. The spatial filter is configured to block one or more undesired diffraction orders of the plurality of diffraction orders and to pass one or more desired diffraction orders of the plurality of diffraction orders. The spatial filter includes one or more obscurations having an angular dependent radius that varies azimuthally. The detector is configured to receive and measure an intensity of the one or more desired diffraction orders. The spatial filter is motorized.