公开(公告)号：US12230013B2

公开(公告)日：2025-02-18

申请号：US18365134

申请日：2023-08-03

Applicant: ASML Netherlands B.V.

Inventor： Wentian Zhou ,  Liangjiang Yu ,  Teng Wang ,  Lingling Pu ,  Wei Fang

IPC: G06T7/00 ,  G06F18/214 ,  G06V10/774 ,  G06V10/776 ,  G06V10/98

Abstract: Disclosed herein is a method of automatically obtaining training images to train a machine learning model that improves image quality. The method may comprise analyzing a plurality of patterns of data relating to a layout of a product to identify a plurality of training locations on a sample of the product to use in relation to training the machine learning model. The method may comprise obtaining a first image having a first quality for each of the plurality of training locations, and obtaining a second image having a second quality for each of the plurality of training locations, the second quality being higher than the first quality. The method may comprise using the first image and the second image to train the machine learning model.

公开(公告)号：US11769317B2

公开(公告)日：2023-09-26

申请号：US16718706

申请日：2019-12-18

Applicant: ASML Netherlands B.V.

Inventor： Wentian Zhou ,  Liangjiang Yu ,  Teng Wang ,  Lingling Pu ,  Wei Fang

IPC: G06T7/00 ,  G06V10/774 ,  G06F18/214 ,  G06V10/776 ,  G06V10/98

CPC classification number: G06V10/774 ,  G06F18/214 ,  G06T7/0006 ,  G06V10/776 ,  G06V10/993 ,  G06T2207/10061 ,  G06T2207/20081 ,  G06T2207/30148

Abstract: Disclosed herein is a method of automatically obtaining training images to train a machine learning model that improves image quality. The method may comprise analyzing a plurality of patterns of data relating to a layout of a product to identify a plurality of training locations on a sample of the product to use in relation to training the machine learning model. The method may comprise obtaining a first image having a first quality for each of the plurality of training locations, and obtaining a second image having a second quality for each of the plurality of training locations, the second quality being higher than the first quality. The method may comprise using the first image and the second image to train the machine learning model.

公开(公告)号：US11694312B2

公开(公告)日：2023-07-04

申请号：US17308835

申请日：2021-05-05

Applicant: ASML Netherlands B.V.

Inventor： Wei Fang ,  Ruochong Fei ,  Lingling Pu ,  Wentian Zhou ,  Liangjiang Yu ,  Bo Wang

IPC: G06T5/00 ,  G06T7/10 ,  G06T5/50

CPC classification number: G06T5/003 ,  G06T5/50 ,  G06T7/10 ,  G06T2207/10061 ,  G06T2207/20201 ,  G06T2207/30148

Abstract: An improved method and apparatus for enhancing an inspection image in a charged-particle beam inspection system. An improved method for enhancing an inspection image comprises acquiring a first image and a second image of multiple stacked layers of a sample that are taken with a first focal point and a second focal point, respectively, associating a first segment of the first image with a first layer among the multiple stacked layers and associating a second segment of the second image with a second layer among the multiple stacked layers, updating the first segment based on a first reference image corresponding to the first layer and updating the second segment based on a second reference image corresponding to the second layer, and combining the updated first segment and the updated second segment to generate a combined image including the first layer and the second layer.