公开(公告)号：US10962890B2

公开(公告)日：2021-03-30

申请号：US16959738

申请日：2018-11-29

Applicant: ASML Netherlands B.V.

Inventor： Wilhelmus Franciscus Johannes Simons ,  Dave Braaksma ,  Hans Butler ,  Hendrikus Herman Marie Cox ,  René Wilhelmus Antonius Hubertus Leenaars ,  Stephan Christiaan Quintus Libourel ,  Martinus Van Duijnhoven ,  Maurice Willem Jozef Etiënne Wijckmans

IPC: G03F7/20

Abstract: The present invention relates to a positioning system, including: a first actuator to exert an actuation force on a moveable body, the first actuator being coupled to a balance mass configured to absorb a reaction force resulting from the actuation force, the actuation force providing an acceleration of the moveable body and the reaction force providing an acceleration of the balance mass, wherein a force resulting from the acceleration of the moveable body together with a force resulting from the acceleration of the balance mass result in a balance mass torque; a balance mass support to support the balance mass onto a frame, which balance mass support engages the frame at a support position; and a torque compensator; wherein the torque compensator exerts a compensation force to compensate the balance mass torque, and wherein the torque compensator exerts the compensation force on the frame at the support position.