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Patent Agency Ranking
公开(公告)号：US10962890B2
公开(公告)日：2021-03-30
申请号：US16959738
申请日：2018-11-29
Applicant: ASML Netherlands B.V.
Inventor： Wilhelmus Franciscus Johannes Simons , Dave Braaksma , Hans Butler , Hendrikus Herman Marie Cox , René Wilhelmus Antonius Hubertus Leenaars , Stephan Christiaan Quintus Libourel , Martinus Van Duijnhoven , Maurice Willem Jozef Etiënne Wijckmans
IPC: G03F7/20
Abstract: The present invention relates to a positioning system, including: a first actuator to exert an actuation force on a moveable body, the first actuator being coupled to a balance mass configured to absorb a reaction force resulting from the actuation force, the actuation force providing an acceleration of the moveable body and the reaction force providing an acceleration of the balance mass, wherein a force resulting from the acceleration of the moveable body together with a force resulting from the acceleration of the balance mass result in a balance mass torque; a balance mass support to support the balance mass onto a frame, which balance mass support engages the frame at a support position; and a torque compensator; wherein the torque compensator exerts a compensation force to compensate the balance mass torque, and wherein the torque compensator exerts the compensation force on the frame at the support position.
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公开(公告)号：US11837931B2
公开(公告)日：2023-12-05
申请号：US17690203
申请日：2022-03-09
Applicant: ASML Netherlands B.V.
Inventor： Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
CPC classification number: H02K3/28 , G03F7/70758 , H02K41/031 , H02K7/09 , H02K29/03 , H02K2201/18 , H02K2213/03
Abstract: An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.
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公开(公告)号：US20220200385A1
公开(公告)日：2022-06-23
申请号：US17690203
申请日：2022-03-09
Applicant: ASML Netherlands B.V.
Inventor： Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
Abstract: An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.
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公开(公告)号：US11303175B2
公开(公告)日：2022-04-12
申请号：US16073258
申请日：2017-01-05
Applicant: ASML Netherlands B.V.
Inventor： Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
Abstract: An electromagnetic motor is described, the electromagnetic motor comprising:
a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction;
a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.-
5.发明申请公开(公告)号：US20190036405A1
公开(公告)日：2019-01-31
申请号：US16073258
申请日：2017-01-05
Applicant: ASML Netherlands B.V.
Inventor： Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
Abstract: An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.
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