公开(公告)号：US20230207252A1

公开(公告)日：2023-06-29

申请号：US18168531

申请日：2023-02-13

Applicant: ASML Netherlands B.V.

Inventor： Derk Ferdinand WALVOORT ,  Marc SMITS ,  Teunis VAN DE PEUT

IPC: H01J37/15

CPC classification number: H01J37/15 ,  H01J37/28

Abstract: Disclosed herein is an actuator arrangement comprising: a wall defining a cavity; a casing protruding from the wall and defining an interior in fluid communication with the cavity; an actuator comprising: a force imparter configured to impart force on a component in the cavity; and an actuation mechanism configured to drive the force imparter, wherein at least part of the actuation mechanism is within said interior of the casing and exposed to the cavity; and a control element configured to control the actuation mechanism, wherein the control element extends through the casing via a seal.