公开(公告)号：US20190201943A1

公开(公告)日：2019-07-04

申请号：US16234190

申请日：2018-12-27

Applicant: ASML Netherlands B.V.

Inventor： Tim Peter Johan Gerard MAAS ,  Bartolomeus Martinus Johannes VAN HOUT ,  Henricus Wilhelmus Maria VAN BUEL ,  Floris ZOETHOUT

IPC: B08B6/00 ,  G03F7/20

CPC classification number: B08B6/00 ,  G03F7/7065 ,  G03F7/7085 ,  G03F7/70916 ,  G03F7/70925

Abstract: An apparatus (300) for removing contaminant particles (205) from a component (202, 204) of an apparatus (140, MT), the contaminant particles giving rise to an ambient electric field (E), the apparatus comprising: a collection region (301) for attracting the particles, wherein the ambient electric field is at least between the component and the collection region; and an electric field generator configured to establish an applied electric field between the collection region and the component to cause the particles to be transported from the component to the collection region, wherein the electric field generator is configured to determine the polarity of the applied electric field based on the ambient electric field.