公开(公告)号：US12276918B2

公开(公告)日：2025-04-15

申请号：US18016226

申请日：2021-06-17

Applicant: ASML Netherlands B.V.

Inventor： Mauritius Gerardus Elisabeth Schneiders ,  Koos Van Berkel ,  Wenjie Jin

IPC: G03F7/00 ,  G06F17/12

Abstract: A method for calculating a spatial map associated with a component, the spatial map indicating spatial variations of thermal expansion parameters in the component, the method comprising: providing or determining a temperature distribution in the component as a function of time; calculating the spatial map associated with the component using the provided or determined temperature distribution in the component and optical measurements of a radiation beam that has interacted directly or indirectly with the component, the optical measurements being time synchronized with the provided or determined temperature distribution in the component.

公开(公告)号：US12044951B2

公开(公告)日：2024-07-23

申请号：US17769725

申请日：2020-10-07

Applicant: ASML Netherlands B.V.

Inventor： Wenjie Jin ,  Nan Lin ,  Christina Lynn Porter ,  Petrus Wilhelmus Smorenburg

IPC: G02F1/355 ,  G02F1/35 ,  G03F7/00

CPC classification number: G02F1/354 ,  G02F1/355 ,  G03F7/70033 ,  G03F7/706847

Abstract: Disclosed is an illumination source comprising a gas delivery system comprising a gas nozzle. The gas nozzle comprises an opening in an exit plane of the gas nozzle. The gas delivery system is configured to provide a gas flow from the opening for generating an emitted radiation at an interaction region. The illumination source is configured to receive a pump radiation having a propagation direction and to provide the pump radiation in the gas flow. A geometry shape of the gas nozzle is adapted to shape a profile of the gas flow such that gas density of the gas flow first increases to a maximum value and subsequently falls sharply in a cut-off region along the propagation direction.