公开(公告)号：US20250036030A1

公开(公告)日：2025-01-30

申请号：US18716111

申请日：2022-11-18

Applicant: ASML Netherlands B.V.

Inventor： Haoyi LIANG ,  Ye GUO ,  Zhichao CHEN

IPC: G03F7/00 ,  G03F1/84 ,  G06T7/00 ,  G06T7/30 ,  H01L21/66

Abstract: An improved method and system for image alignment of an inspection image are disclosed. An improved method comprises acquiring an inspection image, acquiring a reference image corresponding to the inspection image, acquiring a target alignment between the inspection image and the reference image based on characteristics of the inspection image and the reference image, estimating an alignment parameter based on the target alignment, and applying the alignment parameter to a subsequent inspection image.