公开(公告)号：US20160125589A1

公开(公告)日：2016-05-05

申请号：US14882122

申请日：2015-10-13

Applicant: Applied Materials, Inc.

Inventor： Leonid M. TERTITSKI ,  Schubert S. CHU ,  Shay ASSAF ,  Kim R. VELLORE ,  Zhepeng CONG

IPC: G06T7/00 ,  G06T3/60 ,  H04N5/3745 ,  G06T7/40

CPC classification number: G06T7/0004 ,  G06T2207/10024 ,  G06T2207/30148

Abstract: A method and apparatus for detecting substrate misalignment (i.e., position displacement error) and/or substrate support misalignment. According to certain aspects, a method for detecting a misalignment of an object in a processing system is provided. The method generally includes obtaining a first image of the object, determining first values associated with pixels in at least one region of the first image, calculating at least one of a center of gravity value of the pixels in the at least one region or an average weight of the pixels in the at least one region, and detecting a misalignment of the object based on at least one of the calculated center of gravity or average weight of the pixels in the at least one region.

Abstract translation: 用于检测基板未对准（即，位置偏移误差）和/或基板支撑未对准的方法和装置。 根据某些方面，提供了一种用于检测处理系统中的对象的未对准的方法。 该方法通常包括获得对象的第一图像，确定与第一图像的至少一个区域中的像素相关联的第一值，计算至少一个区域中的像素的重心值或平均值 基于至少一个区域中的像素的计算重心或平均重量中的至少一个来检测对象的未对准。