公开(公告)号：US20220130700A1

公开(公告)日：2022-04-28

申请号：US17647120

申请日：2022-01-05

申请人： Applied Materials, Inc.

发明人： Jacob NEWMAN ,  Ulrich OLDENDORF ,  Martin AENIS ,  Andrew J. CONSTANT ,  Shay ASSAF ,  Jeffrey C. HUDGENS ,  Alexander BERGER ,  William Tyler WEAVER

IPC分类号： H01L21/677 ,  B65G47/92 ,  H01L21/67 ,  H01L21/687

摘要： Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

公开(公告)号：US20160125589A1

公开(公告)日：2016-05-05

申请号：US14882122

申请日：2015-10-13

申请人： Applied Materials, Inc.

发明人： Leonid M. TERTITSKI ,  Schubert S. CHU ,  Shay ASSAF ,  Kim R. VELLORE ,  Zhepeng CONG

IPC分类号： G06T7/00 ,  G06T3/60 ,  H04N5/3745 ,  G06T7/40

CPC分类号： G06T7/0004 ,  G06T2207/10024 ,  G06T2207/30148

摘要： A method and apparatus for detecting substrate misalignment (i.e., position displacement error) and/or substrate support misalignment. According to certain aspects, a method for detecting a misalignment of an object in a processing system is provided. The method generally includes obtaining a first image of the object, determining first values associated with pixels in at least one region of the first image, calculating at least one of a center of gravity value of the pixels in the at least one region or an average weight of the pixels in the at least one region, and detecting a misalignment of the object based on at least one of the calculated center of gravity or average weight of the pixels in the at least one region.

摘要翻译： 用于检测基板未对准（即，位置偏移误差）和/或基板支撑未对准的方法和装置。 根据某些方面，提供了一种用于检测处理系统中的对象的未对准的方法。 该方法通常包括获得对象的第一图像，确定与第一图像的至少一个区域中的像素相关联的第一值，计算至少一个区域中的像素的重心值或平均值 基于至少一个区域中的像素的计算重心或平均重量中的至少一个来检测对象的未对准。

公开(公告)号：US20190295872A1

公开(公告)日：2019-09-26

申请号：US16431239

申请日：2019-06-04

申请人： Applied Materials, Inc.

发明人： Shay ASSAF ,  Andrew CONSTANT ,  Jacob NEWMAN ,  Charles CARLSON ,  William Tyler WEAVER ,  Stephen HICKERSON

IPC分类号： H01L21/67

摘要： Methods and apparatus for processing a substrate are provided herein. In one implementation, the apparatus includes a load lock chamber coupled to a transfer chamber. The transfer chamber is coupled to a thermal process chamber and a substrate is transferred between each of the load lock chamber, the transfer chamber, and the thermal process chamber. In other implementations, a process platform having a load lock chamber, a transfer chamber, and a thermal process chamber is disclosed. Methods of measuring oxygen concentration in a load lock chamber via evacuation of a transfer chamber are also described herein.

公开(公告)号：US20190237352A1

公开(公告)日：2019-08-01

申请号：US15885120

申请日：2018-01-31

申请人： APPLIED MATERIALS, INC.

发明人： Niranjan KUMAR ,  Seshadri RAMASWAMI ,  Shay ASSAF ,  Amikam SADE ,  Andy CONSTANT ,  Maureen BREILING

IPC分类号： H01L21/683 ,  H01L21/67

摘要： Embodiments include a method for processing thin substrates. Embodiments may include electrostatically bonding a substrate to a first electrostatic carrier (ESC), with a backside of the substrate is facing away from the first ESC. Thereafter, the substrate may be thinned to form a thinned substrate. The thinned substrate may then be transferred to a second ESC with a front side of the thinned substrate facing away from the second ESC. Embodiments may include cleaning the front side surface of the thinned substrate and transferring the thinned substrate to a third ESC. In an embodiment, a backside of the thinned substrate is facing away from the third ESC. Embodiments may also include processing the backside surface of the thinned substrate, and transferring the thinned substrate to a tape frame.

公开(公告)号：US20180254207A1

公开(公告)日：2018-09-06

申请号：US15660784

申请日：2017-07-26

申请人： Applied Materials, Inc.

发明人： Shay ASSAF ,  Andrew CONSTANT ,  Jacob NEWMAN ,  Charles CARLSON ,  William Tyler WEAVER ,  Stephen HICKERSON

IPC分类号： H01L21/67

CPC分类号： H01L21/67196 ,  H01L21/67109 ,  H01L21/67161 ,  H01L21/67184 ,  H01L21/67201 ,  H01L21/67207

摘要： Methods and apparatus for processing a substrate are provided herein. In one implementation, the apparatus includes a load lock chamber coupled to a transfer chamber. The transfer chamber is coupled to a thermal process chamber and a substrate is transferred between each of the load lock chamber, the transfer chamber, and the thermal process chamber. In other implementations, a process platform having a load lock chamber, a transfer chamber, and a thermal process chamber is disclosed. Methods of measuring oxygen concentration in a load lock chamber via evacuation of a transfer chamber are also described herein.