公开(公告)号：US20210142976A1

公开(公告)日：2021-05-13

申请号：US16676717

申请日：2019-11-07

Applicant: Applied Materials, Inc.

Inventor： Mehdi VAEZ-IRAVANI ,  Christopher Dennis BENCHER ,  Krishna SREERAMBHATLA ,  Hussein FAWAZ ,  Lior ENGEL ,  Robert PERLMUTTER

IPC: H01J37/20 ,  H01J37/317 ,  H01J37/21 ,  H01J37/147 ,  H01J37/09 ,  H01J37/04 ,  H01L21/027 ,  G03F7/20

Abstract: A method of method of operating a multibeamlet charged particle device is disclosed. In the method, a target attached to a stage is translated, and each step of selecting beamlets, initializing beamlets, and exposing the target is repeated. The step of selecting beamlets includes passing a reconfigurable plurality of selected beamlets through the blanking circuit. The step of initializing beamlets includes pointing each of the selected beamlets in an initial direction. The step of exposing the target includes scanning each of the selected beamlets from the initial direction to a final direction, and irradiating a plurality of regions of the target on the stage with the selected beamlets.