公开(公告)号：US20250157775A1

公开(公告)日：2025-05-15

申请号：US18944039

申请日：2024-11-12

Applicant: Axcelis Technologies, Inc.

Inventor： Steve T. Drummond

IPC: H01J1/26 ,  H01J37/30 ,  H01J37/317

Abstract: A cathode filament device for an indirectly heated cathode has a first and second filament rods having respective first and second engagement portions. The first engagement portion has a first engagement body with first and second positioning features extending from the first engagement body. The second engagement portion has at least a second engagement body. Third and fourth positioning features may extend from the second engagement body. First and second clamping members have respective clamping surfaces configured to selectively engage the respective first and second engagement bodies. At least the first positioning feature limits a translation of the first filament rod with respect to the first clamping member along a first axis. The second, third, and fourth positioning features may further limit the translation and secure a position of a filament coupled to the first and second filament rods.