Mask structure for X-ray lithography
    1.
    发明授权
    Mask structure for X-ray lithography 失效
    X射线光刻的掩模结构

    公开(公告)号:US3892973A

    公开(公告)日:1975-07-01

    申请号:US44292174

    申请日:1974-02-15

    CPC classification number: G03F1/22 G03F1/48

    Abstract: A mask structure for use in an x-ray lithographic system comprises as the substrate thereof a Mylar film stretched over and bonded to a support ring. The stretched Mylar film exhibits an attractive combination of advantageous properties such as high planarity, dimensional stability, mechanical strength, low x-ray absorption, resistance to organic solvents, optical transparency, and ready availability in a variety of thicknesses with optical quality surfaces.

    Abstract translation: 用于x射线平版印刷系统的掩模结构包括作为其基底的Mylar膜,其被拉伸并粘合到支撑环上。 拉伸的Mylar薄膜表现出有利的性质,例如高平坦度,尺寸稳定性,机械强度,低x射线吸收,耐有机溶剂的耐受性,光学透明度以及具有光学质量表面的各种厚度的即用可用性的有吸引力的组合。

    Strain-biased fine grain ferroelectric ceramic devices for optical image storage and display systems
    2.
    发明授权
    Strain-biased fine grain ferroelectric ceramic devices for optical image storage and display systems 失效
    用于光学图像存储和显示系统的应变偏心细粒度电光陶瓷器件

    公开(公告)号:US3659270A

    公开(公告)日:1972-04-25

    申请号:US3659270D

    申请日:1970-01-05

    CPC classification number: G02F1/055

    Abstract: A fine grain, ferroelectric ceramic parallel plate, such as lanthanum doped, lead zirconate-lead titanate, is subjected to a constant and uniform stress along a first direction in the plane of the plate. By means of a photoconductive layer and a pair of transparent electrode layers, the ferroelectric plate under stress can be subjected to selective WRITE-IN of a pattern of information using an optical WRITE-IN beam of light, as well as a selective ERASE of such information, all under the control of electric fields only in the normal direction to the plane of the ferroelectric plate produced by D.C. voltages applied to the electrode layers.

    Abstract translation: 在平板的平面中,沿着第一方向的细晶粒,铁电陶瓷平行板,例如掺杂的镧,锆酸铅铅钛酸盐受到恒定均匀的应力。 通过光电导层和一对透明电极层,应力下的铁电板可以使用光写入光束光束进行信息图案的选择性写入,以及这样的选择性擦除 信息,全部在电场的控制下,仅在垂直方向上施加到电极层的直流电压产生的铁电板的平面。

    Optical transmission system including strain-biased electrooptic ceramic devices
    3.
    发明授权
    Optical transmission system including strain-biased electrooptic ceramic devices 失效
    光学传输系统,包括应变电子陶瓷器件

    公开(公告)号:US3695747A

    公开(公告)日:1972-10-03

    申请号:US3695747D

    申请日:1971-06-04

    CPC classification number: G02F1/055

    Abstract: A polycrystalline electrooptic plate, such as a fine grain ferroelectric ceramic plane parallel plate, is subjected to a constant (in time) and uniform (in space) tensile stress along an axis of tension in the plane of the plate. A pair of electrode layers on a major surface of the plate define a gap in the plate, the gap running along a direction at an oblique angle with respect to the axis of tension. Control voltage pulses are applied across these electrodes to produce electric fields in the plane of the plate across the gap, thereby producing a controllable birefringence in the plate with respect to optical radiation propagating normal to the plate in the gap. By locating this place between an optical polarizer and analyzer, an optical switch (''''light gate'''') can be formed with simple electrical access to the electrode layers.

    Strain-biased fine grain electrooptic ceramic device for controlling optical phase retardation
    4.
    发明授权
    Strain-biased fine grain electrooptic ceramic device for controlling optical phase retardation 失效
    用于控制光相位延迟的应变漂白精细电光陶瓷器件

    公开(公告)号:US3663088A

    公开(公告)日:1972-05-16

    申请号:US3663088D

    申请日:1970-08-10

    CPC classification number: G02F1/055 G02F1/31

    Abstract: A controllable optical phase retardation device includes a fine grain electrooptic ceramic plate, such as lanthanum doped lead zirconate-lead titanate. The plate is subjected to a constant and uniform strain with a tension axis in the plane of the plate, while a beam of optical radiation traverses the thickness of the plate. By applying voltages to a pair of transparent electrode layers located on opposed major surfaces of the plate, the degree of birefringence is controlled, that is, the relative optical phase retardation of the extraordinary and ordinary rays in the optical beam propagating through the plate is controllably varied by the electric fields perpendicular to the surfaces of the plate. This control over the phase retardation can be converted into optical intensity modulation or optical beam deflection by means of a conventional polarizer together with an optical analyzer or a doubly refracting prism.

    Abstract translation: 可控光学相位差装置包括细晶电光陶瓷板,例如掺镧铅锆酸铅 - 钛酸铅。 板在板的平面中受到张力轴的恒定均匀应变,而光束穿过板的厚度。 通过对位于板的相对主表面上的一对透明电极层施加电压,控制双折射度,即可控制地传播的光束中的异常和普通光线的相对光相位延迟 由垂直于板表面的电场而变化。 这种对相位延迟的控制可以通过常规偏振器与光学分析器或双折射棱镜一起转换成光强度调制或光束偏转。

Patent Agency Ranking