公开(公告)号：US20200269280A1

公开(公告)日：2020-08-27

申请号：US15930403

申请日：2020-05-12

Applicant: Butterfly Network, Inc.

Inventor： Jonathan M. Rothberg ,  Keith G. Fife ,  Gerard Schmid

IPC: B06B1/06 ,  B06B1/02 ,  H01L41/253 ,  H01L41/332 ,  H01L41/313 ,  A61B8/00

Abstract: Ultrasound devices including piezoelectric micromachined ultrasonic transducers (PMUTs) are described. Frequency tunable PMUT arrays are provided. The PMUTs may be formed on the same substrate or a different substrate than an integrated circuit substrate. The PMUTs may be formed in a variety of ways and from various suitable piezoelectric materials.