公开(公告)号：US11268628B2

公开(公告)日：2022-03-08

申请号：US16905632

申请日：2020-06-18

Applicant: CKD Corporation

Inventor： Akihiro Ito ,  Masayuki Kouketsu ,  Masaya Yamauchi ,  Toshikazu Tsuruga

IPC: F16K31/06 ,  F16K3/02 ,  F16K3/26 ,  F16K17/04 ,  F16K47/02

Abstract: A flow rate ratio control valve includes a pair of plate springs, each of which applies elastic force in a predetermined direction in accordance with the amount of deformation, a valve body supported by the pair of plate springs to be movable in the predetermined direction, a drive unit which drives the valve body in the predetermined direction in a non-contact state by means of electromagnetic force applied to a region between the pair of plate springs in the predetermined direction, a container in which the plate springs and the valve body are contained, and a damper which is attached to the valve body, defines a sectioned predetermined space in cooperation with an inner surface of the container, and forms a predetermined gap between the damper and the inner surface, the predetermined gap establishing communication in the predetermined direction between the predetermined space and the exterior of the predetermined space.