公开(公告)号：US20170004925A1

公开(公告)日：2017-01-05

申请号：US15266835

申请日：2016-09-15

Applicant: COMET AG

Inventor： Mike Abrecht ,  Roger TANNER ,  Mark MlLDNER ,  Philipp JÄGGI ,  Walter BIGLER

IPC: H01G5/14 ,  H01J37/32 ,  H01L31/18 ,  C23C16/505 ,  H01G5/011 ,  H01L21/67

CPC classification number: H01G5/14 ,  H01G5/011 ,  H01G2005/02 ,  H01J37/32082 ,  H01J37/32174 ,  H01J37/32532 ,  H01L31/18

Abstract: A variable vacuum capacitor includes two pairs of electrodes ganged together in series such that no moving parts are required to connect electrically to any static pans. Two sets, or gangs, of movable electrodes are connected mechanically and electrically together such that they move together and such that they require no electrical connection to any other part of the device. The ganged arrangement means that the device can be constructed with a smaller diameter, but without significantly increasing the overall length of the device. The variable vacuum capacitor may be a component of e.g., a power delivery system for a plasma process, a power delivery system for surface treatment, semi-conductor manufacturing equipment, photovoltaic manufacturing equipment, and flat panel manufacturing equipment.

Abstract translation: 可变真空电容器包括两对串联的电极，使得不需要移动部件来电连接到任何静态平底锅。 可移动电极的两组或组合机械和电气连接在一起，使得它们一起移动，使得它们不需要与设备的任何其它部分的电连接。 组合布置意味着该装置可以构造成具有较小的直径，但是不会显着增加装置的总长度。 可变真空电容器可以是例如用于等离子体处理的功率输送系统，用于表面处理的功率输送系统，半导体制造设备，光伏制造设备和平板制造设备的组件。