Method of producing diamond of controlled quality
    1.
    发明授权
    Method of producing diamond of controlled quality 失效
    生产控制质量钻石的方法

    公开(公告)号:US5510157A

    公开(公告)日:1996-04-23

    申请号:US789441

    申请日:1991-11-06

    IPC分类号: C01B31/06 C23C16/27 C23C16/52

    摘要: Making a diamond substance exhibiting a cathodoluminescence spectrum with the peak at a photon energy greater than 2.8 eV (electron volt), the half-value and 20%-value width not exceeding 0.5 eV and 0.8 eV, respectively, comprising: providing a substrate in a closed chamber, introducing a matrix gas comprising H.sub.2 and one selected from hydrocarbon and CO to said chamber, exciting the gas to create a plasma while heating said substrate to a temperature of at least 700.degree. C. and, thus, causing deposition and growth of diamond substance which is crystallographically diamond, controlling parameters of the deposition by means of the cathodoluminescence record and recovering the diamond substance from the chamber.

    摘要翻译: 制备具有阴极发光光谱的金刚石物质,其光子能量大于2.8eV(电子伏特)的峰值,半值和20%值的宽度分别不超过0.5eV和0.8eV,包括:提供基底 封闭的室,将包含H 2和选自烃和CO的一种基质气体引入所述室,激发气体以产生等离子体,同时将所述衬底加热到​​至少700℃的温度,从而引起沉积和生长 通过阴极发光记录控制沉积参数,并从室中回收金刚石物质。

    Method of producing diamond of controlled quality and product produced
thereby
    2.
    发明授权
    Method of producing diamond of controlled quality and product produced thereby 失效
    生产受控质量的金刚石的方法和由此生产的产品

    公开(公告)号:US5882740A

    公开(公告)日:1999-03-16

    申请号:US627320

    申请日:1996-04-01

    IPC分类号: C01B31/06 C23C16/27 C23C16/52

    摘要: A method is provided for efficiently producing an entirely quality-controlled CVD diamond. A CVD process is interrupted at an early stage and the deposit is taken out of the reaction chamber, before a significant mass is accumulated, and is inspected by means of cathodoluminescence. The spectrum are compared with a given reference in terms of peak position, half width and 20%-value width in coordination. The observed deviation allows to determine whether to maintain or alter the settings.A diamond substance of acceptable quality which is properly specified in terms of the CL parameters is also provided.

    摘要翻译: 提供了一种有效地生产完全质量控制的CVD金刚石的方法。 CVD过程在早期中断,并且在积累显着质量之前将沉积物从反应室中取出,并通过阴极发光进行检查。 将频谱与峰值位置,半宽度和20%值宽度协调的给定参考值进行比较。 观察到的偏差允许确定是否维护或更改设置。 还提供了根据CL参数适当指定的可接受质量的钻石物质。